Problem svgcoat SNF 2006-12-07 12:33:16: Track not working!
nvgirish at snf.stanford.edu
nvgirish at snf.stanford.edu
Thu Dec 7 12:33:16 PST 2006
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Shutdown svgcoat SNF 2006-12-07 00:36:01: SVGCOAT Prebake heater not working
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Problem svgcoat SNF 2006-12-07 12:33:16: Track not working!
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Wafer stuck in the HMDS track.
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Shutdown svgcoat SNF 2006-12-07 00:36:01: SVGCOAT Prebake heater not working
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Problem svgcoat SNF 2006-12-07 12:33:16: Track not working!
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