Problem svgcoat SNF 2006-12-07 12:33:16: Track not working!

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Dec 7 12:58:44 PST 2006


there was a sensor waiting for a wafer at the end of the track , I
cleared the sensor and pressed wafer lost , next wafer ( the 
one stuck on HMDS ) continued to next step , ok to use now. 




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