From vilanova at snf.stanford.edu Wed Feb 1 10:00:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Feb 2006 10:00:43 -0800 Subject: Shutdown svgcoat SNF 2006-02-01 10:00:42: Weekly Maintenance Message-ID: Weekly Maintenance in progress........... From vilanova at snf.stanford.edu Wed Feb 1 10:46:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Feb 2006 10:46:25 -0800 Subject: Shutdown svgcoat SNF 2006-02-01 10:00:42: Weekly Maintenance Message-ID: Weekly Maintenance Completed Added EBR to canister, Added HMDS to canister, cleaned catch cup cleaned and lubricated Indexers, cleaned belts and Hotplates , cycled wafers , ready to use. From ankushg at snf.stanford.edu Mon Feb 6 09:54:49 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 6 Feb 2006 09:54:49 -0800 Subject: Problem svgcoat SNF 2006-02-06 09:54:49: EBR backsplash Message-ID: From vilanova at snf.stanford.edu Mon Feb 6 11:18:16 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Feb 2006 11:18:16 -0800 Subject: Problem svgcoat SNF 2006-02-06 09:54:49: EBR backsplash Message-ID: adjusted ebr dispense, cycled wafers, ok to use. From vilanova at snf.stanford.edu Thu Feb 9 10:37:14 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:37:14 -0800 Subject: Comment svgcoat SNF 2005-11-20 10:05:16: found resist coated swabs in the regular trash Message-ID: Comment Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:37:26 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:37:26 -0800 Subject: Comment svgcoat SNF 2005-11-26 09:58:21: found resist coated swabs in the regular garbage Message-ID: Comment Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:37:39 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:37:39 -0800 Subject: Comment svgcoat SNF 2006-01-24 11:59:15: Receiver index working Message-ID: Comment Cleared. From rcordova at snf.stanford.edu Thu Feb 9 13:47:40 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 9 Feb 2006 13:47:40 -0800 Subject: Problem svgcoat SNF 2006-02-09 13:47:40: HMDS is leaking Message-ID: Left message for Mario From vilanova at snf.stanford.edu Thu Feb 9 13:57:12 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 13:57:12 -0800 Subject: Problem svgcoat SNF 2006-02-09 13:47:40: HMDS is leaking Message-ID: Cleaned HMDS Canister, Release Air from Canister , ok to use. From lindaw at snf.stanford.edu Sat Feb 11 11:33:19 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 11 Feb 2006 11:33:19 -0800 Subject: Comment svgcoat SNF 2006-02-11 11:33:19: resist contamination on spin and bake chucks Message-ID: I found the SVGCOAT1 this morning (sat. 11:30 am) a complete mess!! There is resist all over the spinner chuck, and all over the post bake hot plate chuck. I also found resist contaminated swabs in the regular garbage can next to the spinner. The resist was dried by the time I found them, so they must have been in there for some time. I will clean the spin and bake chucks, and I have put the contaminated items in a zip lock bag into the haz mat bin. From vilanova at snf.stanford.edu Mon Feb 13 08:20:24 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Feb 2006 08:20:24 -0800 Subject: Comment svgcoat SNF 2006-02-11 11:33:19: resist contamination on spin and bake chucks Message-ID: thanks linda , I cleaned them real good this morning , ready to use. From gladys at snf.stanford.edu Mon Feb 13 16:02:22 2006 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mon, 13 Feb 2006 16:02:22 -0800 Subject: Problem svgcoat SNF 2006-02-13 16:02:21: EBR back splash Message-ID: From vilanova at snf.stanford.edu Tue Feb 14 07:42:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Feb 2006 07:42:40 -0800 Subject: Problem svgcoat SNF 2006-02-13 16:02:21: EBR back splash Message-ID: the problem was not the EBR but the suck back ( someone was playing with it again! ) Adjusted suck back valve, cycled wafers , ready to use. From jwc at snf.stanford.edu Wed Feb 15 13:56:50 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 15 Feb 2006 13:56:50 -0800 Subject: Problem svgcoat SNF 2006-02-15 13:56:49: strong smell of sweet resist smell from track Message-ID: please check out the firsat track bowl... JWC for Paul J. From vilanova at snf.stanford.edu Wed Feb 15 14:00:06 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Feb 2006 14:00:06 -0800 Subject: Problem svgcoat SNF 2006-02-15 13:56:49: strong smell of sweet resist smell from track Message-ID: this should be under comment not under problem , last user had all the doors open while doing manual dispense. ok to use. From uyoon at snf.stanford.edu Wed Feb 22 09:34:34 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 22 Feb 2006 09:34:34 -0800 Subject: Problem svgcoat SNF 2006-02-22 09:34:34: ebr back splash on 7um resist Message-ID: From jimkruger at snf.stanford.edu Wed Feb 22 13:16:14 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 22 Feb 2006 13:16:14 -0800 Subject: Shutdown svgcoat SNF 2006-02-22 13:16:13: receiver cassette belt not reliable Message-ID: From vilanova at snf.stanford.edu Wed Feb 22 13:38:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Feb 2006 13:38:51 -0800 Subject: Shutdown svgcoat SNF 2006-02-22 13:16:13: receiver cassette belt not reliable Message-ID: Operator error, I just finished running 15 wafers, I could not repeat the problem, ok to use. From vilanova at snf.stanford.edu Thu Feb 23 10:12:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Feb 2006 10:12:46 -0800 Subject: Shutdown svgcoat SNF 2006-02-23 10:12:45: field service in progress........ Message-ID: From vilanova at snf.stanford.edu Thu Feb 23 14:54:28 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Feb 2006 14:54:28 -0800 Subject: Problem svgcoat SNF 2006-02-22 09:34:34: ebr back splash on 7um resist Message-ID: Replaced EBR Valve , Adjusted Cybor Pump Settings for thicker resist , adjusted Wafer sensor for cool station, Cycled 25 wafers , ok to use. From vilanova at snf.stanford.edu Thu Feb 23 14:57:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Feb 2006 14:57:25 -0800 Subject: Shutdown svgcoat SNF 2006-02-23 10:12:45: field service in progress........ Message-ID: Adjusted Settings on Cybor Pump for thicker resist, replaced EBR valve , adjusted wafer sensor for cooling station , cycled wafers , ok to use. From treviscrane at snf.stanford.edu Thu Feb 23 19:21:08 2006 From: treviscrane at snf.stanford.edu (treviscrane at snf.stanford.edu) Date: Thu, 23 Feb 2006 19:21:08 -0800 Subject: Comment svgcoat SNF 2006-02-23 19:21:05: won't start Message-ID: load wafers cassette and receiving cassette, press start (on auto mode) and cassettes lower but nothing happens after that. From king at snf.stanford.edu Fri Feb 24 00:25:14 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 24 Feb 2006 00:25:14 -0800 Subject: Problem svgcoat SNF 2006-02-24 00:25:14: svg1 track error Message-ID: track not moving wafers forward. Enabled, in auto, etc. From vilanova at snf.stanford.edu Fri Feb 24 07:47:24 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 24 Feb 2006 07:47:24 -0800 Subject: Comment svgcoat SNF 2006-02-23 19:21:05: won't start Message-ID: track working fine, A user has been running wafers with no prolbems. From vilanova at snf.stanford.edu Fri Feb 24 07:48:04 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 24 Feb 2006 07:48:04 -0800 Subject: Problem svgcoat SNF 2006-02-24 00:25:14: svg1 track error Message-ID: track working fine, ok to use. From ankushg at snf.stanford.edu Mon Feb 27 10:11:44 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 27 Feb 2006 10:11:44 -0800 Subject: Problem svgcoat SNF 2006-02-27 10:11:44: Non-uniform EBR Message-ID: The EBR is not uniform along the edges of the wafer. However, there is no EBR backsplash. From vilanova at snf.stanford.edu Mon Feb 27 13:50:05 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Feb 2006 13:50:05 -0800 Subject: Problem svgcoat SNF 2006-02-27 10:11:44: Non-uniform EBR Message-ID: adjusted EBR Nozzle, ready to use.