From huangzb at snf.stanford.edu Sun Jul 9 22:02:38 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 9 Jul 2006 22:02:38 -0700 Subject: Problem svgcoat SNF 2006-07-09 22:02:37: control module alarm when coating SPR220 Message-ID: From changyol at snf.stanford.edu Mon Jul 10 08:45:12 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Mon, 10 Jul 2006 08:45:12 -0700 Subject: Problem svgcoat SNF 2006-07-09 22:02:37: control module alarm when coating SPR220 Message-ID: refilled hmds. From rmelamud at snf.stanford.edu Thu Jul 13 00:34:05 2006 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Thu, 13 Jul 2006 00:34:05 -0700 Subject: Problem svgcoat SNF 2006-07-13 00:34:05: edge bead splash Message-ID: Hi, We were trying to use 5mm edgebead removal and there were some small splashes over the wafer. The splashes were only visible under the microscope, however we have very small features that were effected. Would increasing the pressure in the line help with this? Thanks, Renata From vilanova at snf.stanford.edu Thu Jul 13 07:28:04 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Jul 2006 07:28:04 -0700 Subject: Problem svgcoat SNF 2006-07-13 00:34:05: edge bead splash Message-ID: Purged Line , cleaned Dispense hose , Cycled wafers, I could not repeat problem, sometimes users with features or holes on their wafers are not going to get 100% Good results Unless they let the resist sit on the wafer for a few seconds after dispense , I E-mailed user explaining everything and I asked her to come back so I can help her with this issue, Good to use now. From jimkruger at snf.stanford.edu Sun Jul 16 14:25:56 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 16 Jul 2006 14:25:56 -0700 Subject: Problem svgcoat SNF 2006-07-16 14:25:54: HMDS very low Message-ID: From vilanova at snf.stanford.edu Mon Jul 17 07:35:19 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Jul 2006 07:35:19 -0700 Subject: Problem svgcoat SNF 2006-07-16 14:25:54: HMDS very low Message-ID: refilled Empty canister, Ok to use. From asanders4 at snf.stanford.edu Tue Jul 18 22:14:40 2006 From: asanders4 at snf.stanford.edu (asanders4 at snf.stanford.edu) Date: Tue, 18 Jul 2006 22:14:40 -0700 Subject: Problem svgcoat SNF 2006-07-18 22:14:39: Track stopped Message-ID: The tracks on the first cooling plate would not move to transfer the wafer to the coater. From vilanova at snf.stanford.edu Wed Jul 19 07:48:28 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Jul 2006 07:48:28 -0700 Subject: Problem svgcoat SNF 2006-07-18 22:14:39: Track stopped Message-ID: operator Error , we are running wafers on coater and everything is fine, ok to use. From tzangle at snf.stanford.edu Wed Jul 19 22:19:27 2006 From: tzangle at snf.stanford.edu (tzangle at snf.stanford.edu) Date: Wed, 19 Jul 2006 22:19:27 -0700 Subject: Shutdown svgcoat SNF 2006-07-19 22:19:26: HMDS track 1 empty Message-ID: HMDS track 1 alarm was going off. From vilanova at snf.stanford.edu Thu Jul 20 07:30:55 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 Jul 2006 07:30:55 -0700 Subject: Shutdown svgcoat SNF 2006-07-19 22:19:26: HMDS track 1 empty Message-ID: Refilled HMDS Canister, ok to use. From hyunjoo at snf.stanford.edu Thu Jul 20 17:39:01 2006 From: hyunjoo at snf.stanford.edu (hyunjoo at snf.stanford.edu) Date: Thu, 20 Jul 2006 17:39:01 -0700 Subject: Problem svgcoat SNF 2006-07-20 17:39:00: Coater gets stuck. Message-ID: Wafer gets vaccumed to coater but doesn't go down to get coated, then alarmed. From vilanova at snf.stanford.edu Mon Jul 24 11:11:26 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Jul 2006 11:11:26 -0700 Subject: Problem svgcoat SNF 2006-07-20 17:39:00: Coater gets stuck. Message-ID: Monthly Pm Completed , cleaned Catch cup, adjusted EBR and suck back program,cycled wafers ok to use, ALso adjusted the arms for track 2 , ready to use. From vilanova at snf.stanford.edu Tue Jul 25 10:20:54 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Jul 2006 10:20:54 -0700 Subject: Shutdown svgcoat SNF 2006-07-25 10:20:53: exhaust been cleaned. Message-ID: From vilanova at snf.stanford.edu Tue Jul 25 11:32:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Jul 2006 11:32:00 -0700 Subject: Shutdown svgcoat SNF 2006-07-25 10:20:53: exhaust been cleaned. Message-ID: cleaning completed. ok to use. From closega at snf.stanford.edu Tue Jul 25 19:22:26 2006 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Tue, 25 Jul 2006 19:22:26 -0700 Subject: Problem svgcoat SNF 2006-07-25 19:22:26: Program 7 is wrong and cannot be changed Message-ID: The speed of program 7, track 1 are wrong. Yes I did try to change them back to their correct value. And yes, I did verify and it seems that the changes have been correctly entered. But ultimately, as I keep pressing the event select button to double check that everything is fine, some of the speeds go back to zero. Very bizarre. -Gael From vilanova at snf.stanford.edu Wed Jul 26 07:31:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:31:25 -0700 Subject: Problem svgcoat SNF 2006-07-25 19:22:26: Program 7 is wrong and cannot be changed Message-ID: program 7 is fine I checked it and evetything is ok, I could not repeat the user problem, ok to use. From lindaw at snf.stanford.edu Wed Jul 26 12:55:15 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 26 Jul 2006 12:55:15 -0700 Subject: Problem svgcoat SNF 2006-07-26 12:55:14: HMDS alarm is chirping. PSI = 3 Message-ID: From lindaw at snf.stanford.edu Wed Jul 26 12:56:32 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 26 Jul 2006 12:56:32 -0700 Subject: Comment svgcoat SNF 2006-07-26 12:56:31: SVGCOAT HMDS ALARM CHIRPING. Message-ID: Wrote up as a problem, but it is still green light status. From vilanova at snf.stanford.edu Wed Jul 26 14:38:45 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 14:38:45 -0700 Subject: Problem svgcoat SNF 2006-07-26 12:55:14: HMDS alarm is chirping. PSI = 3 Message-ID: Refilled HMDS canister, ok to use. From vilanova at snf.stanford.edu Wed Jul 26 14:39:03 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 14:39:03 -0700 Subject: Comment svgcoat SNF 2006-07-26 12:56:31: SVGCOAT HMDS ALARM CHIRPING. Message-ID: refilled HMDS canister, ok to use. From barlian at snf.stanford.edu Fri Jul 28 01:08:17 2006 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Fri, 28 Jul 2006 01:08:17 -0700 Subject: Problem svgcoat SNF 2006-07-28 01:08:17: HMDS alarm Message-ID: I think it's running out of HMDS From vilanova at snf.stanford.edu Fri Jul 28 07:38:26 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 28 Jul 2006 07:38:26 -0700 Subject: Problem svgcoat SNF 2006-07-28 01:08:17: HMDS alarm Message-ID: refilled HMDS Canister, ready to use. From me342f at snf.stanford.edu Sat Jul 29 14:18:31 2006 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Sat, 29 Jul 2006 14:18:31 -0700 Subject: Problem svgcoat SNF 2006-07-29 14:18:31: Wafer Stuck on Hotplate Message-ID: Saturday 2pm : SVGCOAT2 has a dummy wafer stuck on hot plate, right side up. guessing there was resist on the backside. From lindaw at snf.stanford.edu Sat Jul 29 14:36:24 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 29 Jul 2006 14:36:24 -0700 Subject: Problem svgcoat SNF 2006-07-29 14:36:23: hmds alarm track 1 Message-ID: From ericp at snf.stanford.edu Sat Jul 29 18:56:24 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 29 Jul 2006 18:56:24 -0700 Subject: Comment svgcoat SNF 2006-07-29 18:56:23: HMDS is low, or at least indicates so... Message-ID: I tipped the tank to clear the alarm. The tank feels reasonably full, but doesn't trip the sensor. Maybe a sensor set too high ? Track seems to work fine now. From me342f at snf.stanford.edu Sun Jul 30 16:02:21 2006 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Sun, 30 Jul 2006 16:02:21 -0700 Subject: Problem svgcoat SNF 2006-07-30 16:02:20: send indexer Message-ID: send indexer doesn't go down when 'start' is pressed. From vilanova at snf.stanford.edu Mon Jul 31 09:06:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 31 Jul 2006 09:06:58 -0700 Subject: Problem svgcoat SNF 2006-07-29 14:18:31: Wafer Stuck on Hotplate Message-ID: cleaned hotplate, ready to use. From vilanova at snf.stanford.edu Mon Jul 31 09:07:23 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 31 Jul 2006 09:07:23 -0700 Subject: Problem svgcoat SNF 2006-07-30 16:02:20: send indexer Message-ID: removed old resist from hotplate, ok to use. From vilanova at snf.stanford.edu Mon Jul 31 09:07:41 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 31 Jul 2006 09:07:41 -0700 Subject: Problem svgcoat SNF 2006-07-29 14:36:23: hmds alarm track 1 Message-ID: refilled hmds, ok to use. From vilanova at snf.stanford.edu Mon Jul 31 09:07:59 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 31 Jul 2006 09:07:59 -0700 Subject: Comment svgcoat SNF 2006-07-29 18:56:23: HMDS is low, or at least indicates so... Message-ID: read previous message. From vilanova at snf.stanford.edu Mon Jul 31 15:13:42 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 31 Jul 2006 15:13:42 -0700 Subject: Problem svgcoat SNF 2006-07-31 15:13:41: Thick resist Dispense not working, we'll work on it tomorrow. Message-ID: