Problem svgcoat SNF 2006-07-13 00:34:05: edge bead splash

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Thu Jul 13 00:34:05 PDT 2006


Hi,
We were trying to use 5mm edgebead removal and there were some small splashes over the wafer. The splashes were only visible under the microscope, however we have very small features that were effected. Would increasing the pressure in the line help with this?
Thanks,
Renata




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