Problem svgcoat SNF 2006-07-13 00:34:05: edge bead splash

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 13 07:28:04 PDT 2006


Purged Line , cleaned Dispense hose , Cycled wafers,
I could not  repeat problem, sometimes users with features 
or holes on their wafers are not going to get 100% Good 
results Unless they let the resist sit on the wafer for a few 
seconds after dispense , I  E-mailed user explaining 
everything and I asked her to come back so I can help her 
with this issue, Good to use now. 




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