Problem svgcoat SNF 2006-07-20 17:39:00: Coater gets stuck.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 24 11:11:26 PDT 2006


Monthly Pm Completed , cleaned Catch cup, adjusted EBR
and suck back program,cycled wafers ok to use, ALso adjusted the arms for track 2 , ready to use. 




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