From vilanova at snf.stanford.edu Mon Jun 5 13:39:34 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Jun 2006 13:39:34 -0700 Subject: Shutdown svgcoat SNF 2006-06-05 13:39:33: Maintenance Pm In progress..... Message-ID: From vilanova at snf.stanford.edu Mon Jun 5 14:47:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Jun 2006 14:47:18 -0700 Subject: Shutdown svgcoat SNF 2006-06-05 13:39:33: Maintenance Pm In progress..... Message-ID: Preventive Monthly Maintenance Completed, System Tested and ready to use. From jscyb at snf.stanford.edu Tue Jun 6 01:11:04 2006 From: jscyb at snf.stanford.edu (jscyb at snf.stanford.edu) Date: Tue, 6 Jun 2006 01:11:04 -0700 Subject: Shutdown svgcoat SNF 2006-06-06 01:11:04: svg coater not working Message-ID: Cyber control module alarm went off and processing ceased. The module prompt asked for a pump number. We pressed enter to stop alarm. Several wafers were stuck in process and we could not get it to continue processing subsequently. It recognizes when we start a new process by finding the next wafer in the cassette, but does not load the wafer onto the track. From vilanova at snf.stanford.edu Tue Jun 6 07:14:37 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Jun 2006 07:14:37 -0700 Subject: Shutdown svgcoat SNF 2006-06-06 01:11:04: svg coater not working Message-ID: Coater working perfectly Fine, I Cycled Wafers On different programs ( 1. 4. 7. 8. ) the problem that the last user was having was that Instead of pressing the ENT ( enter ) Button to stop the Alarm he was pressing Test ( to test the Pump ) the system Got COnfused and stop on them , ALso please Do not ran wafers Upside down , I found a lot of the dummy wafers with resist on the back side and also ressit on hotplate,Tested , and ready to use. From wessmith at snf.stanford.edu Mon Jun 19 22:39:00 2006 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Mon, 19 Jun 2006 22:39:00 -0700 Subject: Problem svgcoat SNF 2006-06-19 22:39:00: Cybor control module alarming Message-ID: Control module on bottom right half of machine is alarming- not sure how to turn it off or why it is alarming From vilanova at snf.stanford.edu Tue Jun 20 06:33:56 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 Jun 2006 06:33:56 -0700 Subject: Problem svgcoat SNF 2006-06-19 22:39:00: Cybor control module alarming Message-ID: To Stop The Alarm On Cybor Controller just Press " Enter" and that will clear the alarm , ok To use.