From mahnaz at snf.stanford.edu Wed Nov 1 10:51:33 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Nov 2006 10:51:33 -0800 Subject: Shutdown svgcoat SNF 2006-11-01 10:51:32: arm program are messed up Message-ID: I am not sure what has happened, I wil reprogram it and go from there. From mahnaz at snf.stanford.edu Wed Nov 1 16:52:15 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Nov 2006 16:52:15 -0800 Subject: Comment svgcoat SNF 2006-11-01 16:52:15: EBR is not working and the line to pump the carboy is temperorly Message-ID: is switched to track2. From mahnaz at snf.stanford.edu Fri Nov 3 16:09:54 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 3 Nov 2006 16:09:54 -0800 Subject: Shutdown svgcoat SNF 2006-11-01 10:51:32: arm program are messed up Message-ID: I have reprogrammed all the ARM program, every program is working except #2. Please do not try to run it as the system will get stuck and then reseting the sytem might cause to loose some info on the program. From mahnaz at snf.stanford.edu Fri Nov 3 17:10:29 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 3 Nov 2006 17:10:29 -0800 Subject: Comment svgcoat SNF 2006-11-01 16:52:15: EBR is not working and the line to pump the carboy is temperorly Message-ID: Top and bottom EBR are fixed. From mahnaz at snf.stanford.edu Fri Nov 3 17:15:08 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 3 Nov 2006 17:15:08 -0800 Subject: Comment svgcoat SNF 2006-11-03 17:15:07: Up Message-ID: Everything is changed with regard to ARM program.I have ran test on !um, 1.6 um and 7 um all the reading are within the spec. Please if you see starnge behavior report it. I think the back up battery might not be in good shape but not sure. Program 2 is not working. From ericp at snf.stanford.edu Fri Nov 3 20:32:22 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 3 Nov 2006 20:32:22 -0800 Subject: Comment svgcoat SNF 2006-11-03 20:32:21: PRG#2 and #7 now work Message-ID: Prg2 and 7 now are working, but the suckback on the pump is not working properly. In prg#2, it's not an issue since the disp nozzle will be off to the side, but in prg#7, during the EBR step, it might drip on your wafer. If you need EBR, you can blot the resist from the nozzle after each dispense, to prevent drippage. Also, the supply line on DISP1 had a leak near the bottle. I repaired the leak- no more bubbles. I think SVGCOAT is narrowed down to a suckback problem at this point. From cmgas at snf.stanford.edu Sun Nov 5 10:33:10 2006 From: cmgas at snf.stanford.edu (cmgas at snf.stanford.edu) Date: Sun, 5 Nov 2006 10:33:10 -0800 Subject: Problem svgcoat SNF 2006-11-05 10:33:10: HMDS alarm on track1 Message-ID: The HMDS alarm was sounding on Sunday Nov 5 at 10:15am. I turn the audible alarm off. Do not use the prime station on track 1. From vilanova at snf.stanford.edu Mon Nov 6 07:59:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 07:59:43 -0800 Subject: Problem svgcoat SNF 2006-11-05 10:33:10: HMDS alarm on track1 Message-ID: HMDS Canister Refilled From vilanova at snf.stanford.edu Mon Nov 6 08:00:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 08:00:18 -0800 Subject: Comment svgcoat SNF 2006-10-20 07:50:18: Parts On order Message-ID: cleared Comment. From cmgas at snf.stanford.edu Mon Nov 6 13:18:47 2006 From: cmgas at snf.stanford.edu (cmgas at snf.stanford.edu) Date: Mon, 6 Nov 2006 13:18:47 -0800 Subject: Problem svgcoat SNF 2006-11-06 13:18:47: Broken wafer in coater Message-ID: From vilanova at snf.stanford.edu Mon Nov 6 14:54:17 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 14:54:17 -0800 Subject: Problem svgcoat SNF 2006-10-11 16:57:12: Message-ID: From vilanova at snf.stanford.edu Mon Nov 6 14:58:11 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 14:58:11 -0800 Subject: Problem svgcoat SNF 2006-10-31 20:59:08: program# 2 will not go from event 3 (dispense) into event 4 (spin) Message-ID: All of the programs are working fine now. I adjusted Suck back and dispense for programs # 2 , 4, 6, 7, and #8 added EBR to canister , Added HMDS canister, cleaned catch cup . From vilanova at snf.stanford.edu Mon Nov 6 14:59:13 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 14:59:13 -0800 Subject: Comment svgcoat SNF 2006-11-03 17:15:07: Up Message-ID: Please read previous message. From vilanova at snf.stanford.edu Mon Nov 6 15:00:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:00:52 -0800 Subject: Comment svgcoat SNF 2006-11-03 20:32:21: PRG#2 and #7 now work Message-ID: All programs are working fine now , please read previous messages. From vilanova at snf.stanford.edu Mon Nov 6 15:01:12 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:01:12 -0800 Subject: Problem svgcoat SNF 2006-11-06 13:18:47: Broken wafer in coater Message-ID: cleaned broken wafer pieces, ok to use. From bchui at snf.stanford.edu Mon Nov 6 23:17:14 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 6 Nov 2006 23:17:14 -0800 Subject: Problem svgcoat SNF 2006-11-06 23:17:14: Receive indexer moves up 2 notches every time Message-ID: i.e. it puts a wafer into every other slot, and I run out of space after 12 or 13 wafers. Was that an intended change? From gyama at snf.stanford.edu Tue Nov 7 10:14:50 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 7 Nov 2006 10:14:50 -0800 Subject: Comment svgcoat SNF 2006-11-07 10:14:49: exit cassette unloading every other slot Message-ID: From vilanova at snf.stanford.edu Wed Nov 8 08:23:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Nov 2006 08:23:18 -0800 Subject: Problem svgcoat SNF 2006-11-06 23:17:14: Receive indexer moves up 2 notches every time Message-ID: Adjusted receive Indexer Air flow, now is working normal ( taking one wafer at the time ) From vilanova at snf.stanford.edu Wed Nov 8 08:23:28 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Nov 2006 08:23:28 -0800 Subject: Comment svgcoat SNF 2006-11-07 10:14:49: exit cassette unloading every other slot Message-ID: comment cleared. From rcordova at snf.stanford.edu Wed Nov 8 10:35:20 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 8 Nov 2006 10:35:20 -0800 Subject: Problem svgcoat SNF 2006-11-08 10:35:19: Receive cassette not indexing Message-ID: Wafers are piling up into slot #1 From vilanova at snf.stanford.edu Wed Nov 8 11:24:32 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Nov 2006 11:24:32 -0800 Subject: Problem svgcoat SNF 2006-11-08 10:35:19: Receive cassette not indexing Message-ID: Adjusted sensor, cycled wafers , ok to use. From kupnik at snf.stanford.edu Tue Nov 14 11:07:27 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Tue, 14 Nov 2006 11:07:27 -0800 Subject: Problem svgcoat SNF 2006-11-14 11:07:26: 7 um resist does not cover right Message-ID: There are drops at the beginning when the resist (SPR220-7) comes out of the nozzle. From vilanova at snf.stanford.edu Tue Nov 14 15:19:39 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Nov 2006 15:19:39 -0800 Subject: Problem svgcoat SNF 2006-11-14 11:07:26: 7 um resist does not cover right Message-ID: Purged Line , Adjusted Suck back Thick resist dispense, Cleaned dispense hose, Ok to use. From kmla1 at snf.stanford.edu Wed Nov 15 11:55:06 2006 From: kmla1 at snf.stanford.edu (kmla1 at snf.stanford.edu) Date: Wed, 15 Nov 2006 11:55:06 -0800 Subject: Problem svgcoat SNF 2006-11-15 11:55:05: coat program #4 Message-ID: i cleaned the nozzle and ran two dummy wafers, but uniformity is very bad From uli at snf.stanford.edu Thu Nov 16 11:17:34 2006 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 16 Nov 2006 11:17:34 -0800 Subject: Problem svgcoat SNF 2006-11-16 11:17:33: EBR problem Message-ID: Prog 7, using arm position 7 in event 5, you will only get 2mm EBR instead of 5mm. From vilanova at snf.stanford.edu Thu Nov 16 11:53:20 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Nov 2006 11:53:20 -0800 Subject: Problem svgcoat SNF 2006-11-16 11:17:33: EBR problem Message-ID: Adjusted Arm position , ok to use. From vilanova at snf.stanford.edu Fri Nov 17 10:06:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Nov 2006 10:06:46 -0800 Subject: Shutdown svgcoat SNF 2006-11-17 10:06:45: Maintenance in progress.... Message-ID: From vilanova at snf.stanford.edu Fri Nov 17 12:05:31 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Nov 2006 12:05:31 -0800 Subject: Problem svgcoat SNF 2006-11-15 11:55:05: coat program #4 Message-ID: replaced broken EBR 3 way Valve and suck back Valve , adjusted thick resist dispense hose cycled wafers , uniformity Good , ok to use. From vilanova at snf.stanford.edu Fri Nov 17 12:06:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Nov 2006 12:06:25 -0800 Subject: Shutdown svgcoat SNF 2006-11-17 10:06:45: Maintenance in progress.... Message-ID: Repair Completed, read previous message. THANKS JIM HAYDON!!!!! From emyers at snf.stanford.edu Sun Nov 19 12:23:59 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 19 Nov 2006 12:23:59 -0800 Subject: Shutdown svgcoat SNF 2006-11-19 12:23:59: HMDS Alarm Message-ID: HMDS Alarm, Shutting down per operating procedure From vilanova at snf.stanford.edu Mon Nov 20 07:49:02 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Nov 2006 07:49:02 -0800 Subject: Shutdown svgcoat SNF 2006-11-19 12:23:59: HMDS Alarm Message-ID: refilled canister. From mislam at snf.stanford.edu Wed Nov 22 11:21:46 2006 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 22 Nov 2006 11:21:46 -0800 Subject: Problem svgcoat SNF 2006-11-22 11:21:46: broken wafer on prime station Message-ID: From mislam at snf.stanford.edu Wed Nov 22 11:38:26 2006 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 22 Nov 2006 11:38:26 -0800 Subject: Shutdown svgcoat SNF 2006-11-22 11:38:25: wafer broke in prime station Message-ID: From vilanova at snf.stanford.edu Wed Nov 22 13:19:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Nov 2006 13:19:25 -0800 Subject: Problem svgcoat SNF 2006-11-22 11:21:46: broken wafer on prime station Message-ID: removed broken wafer pieces, cleaned HMDS hotplate and Lubricated Top O ring, cycled wafers , ready to use. From vilanova at snf.stanford.edu Wed Nov 22 13:19:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Nov 2006 13:19:44 -0800 Subject: Shutdown svgcoat SNF 2006-11-22 11:38:25: wafer broke in prime station Message-ID: Please read previous message. From shwong at snf.stanford.edu Sat Nov 25 11:06:42 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Sat, 25 Nov 2006 11:06:42 -0800 Subject: Problem svgcoat SNF 2006-11-25 11:06:41: can't seem to get it to run in automatic; ran it in manual mode Message-ID: From jimkruger at snf.stanford.edu Sun Nov 26 16:50:40 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 26 Nov 2006 16:50:40 -0800 Subject: Problem svgcoat SNF 2006-11-26 16:50:39: could only run in manual mode ?? Message-ID: From vilanova at snf.stanford.edu Mon Nov 27 07:53:38 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Nov 2006 07:53:38 -0800 Subject: Problem svgcoat SNF 2006-11-25 11:06:41: can't seem to get it to run in automatic; ran it in manual mode Message-ID: HMDS Empty canister, refilled canister , good to use. From vilanova at snf.stanford.edu Mon Nov 27 07:54:09 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Nov 2006 07:54:09 -0800 Subject: Problem svgcoat SNF 2006-11-26 16:50:39: could only run in manual mode ?? Message-ID: Read previous message. From tomada at snf.stanford.edu Tue Nov 28 16:04:48 2006 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Tue, 28 Nov 2006 16:04:48 -0800 Subject: Comment svgcoat SNF 2006-11-28 16:04:47: Truck1 Message-ID: SPR prog#6 always has a bubble at the beginning of dispence wich become a comet. From ericp at snf.stanford.edu Tue Nov 28 19:34:14 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 28 Nov 2006 19:34:14 -0800 Subject: Problem svgcoat SNF 2006-11-28 19:34:14: CDA pressure too high Message-ID: It seems that thinner wafers (like our standard 375 micron DSP wafers) get blown around by the air sensors, falsely triggering them, or worse, blowing them off the rails. I think it's just becuase the air pressure was increased recently. From vilanova at snf.stanford.edu Wed Nov 29 08:10:32 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Nov 2006 08:10:32 -0800 Subject: Problem svgcoat SNF 2006-11-28 19:34:14: CDA pressure too high Message-ID: Lowered CDS Pressure , Cycled wafers ok to use. From vilanova at snf.stanford.edu Wed Nov 29 08:11:39 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Nov 2006 08:11:39 -0800 Subject: Comment svgcoat SNF 2006-11-28 16:04:47: Truck1 Message-ID: purged line, adjusted suck back , cycled wafers , no more bubbles, ok to use. From uli at snf.stanford.edu Wed Nov 29 10:48:39 2006 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 29 Nov 2006 10:48:39 -0800 Subject: Problem svgcoat SNF 2006-11-29 10:48:38: prog7 arm7 position not 5mm Message-ID: prog7 arm7 position not 5 mm. From vilanova at snf.stanford.edu Wed Nov 29 11:45:01 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Nov 2006 11:45:01 -0800 Subject: Problem svgcoat SNF 2006-11-29 10:48:38: prog7 arm7 position not 5mm Message-ID: Mahnaz and I entered Arm programs, Cycled wafers, Wafers Measure 5mm EBR, Ok to use.