Problem svgcoat SNF 2006-11-15 11:55:05: coat program #4
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Nov 17 12:05:31 PST 2006
replaced broken EBR 3 way Valve and suck back Valve ,
adjusted thick resist dispense hose cycled wafers , uniformity Good , ok to use.
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