Problem svgcoat SNF 2006-11-15 11:55:05: coat program #4

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Nov 17 12:05:31 PST 2006


replaced broken EBR 3 way Valve and suck back Valve , 
adjusted  thick resist dispense hose cycled wafers , uniformity Good , ok to use. 




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