Problem svgcoat SNF 2006-11-22 11:21:46: broken wafer on prime station

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Nov 22 13:19:25 PST 2006

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removed broken wafer pieces, cleaned HMDS hotplate and 
Lubricated Top O ring, cycled wafers , ready to use.

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