Problem svgcoat SNF 2006-11-25 11:06:41: can't seem to get it to run in automatic; ran it in manual mode
shwong at snf.stanford.edu
shwong at snf.stanford.edu
Sat Nov 25 11:06:42 PST 2006
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Shutdown svgcoat SNF 2006-11-22 11:38:25: wafer broke in prime station
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Problem svgcoat SNF 2006-11-25 11:06:41: can't seem to get it to run in automatic; ran it in manual mode
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Shutdown svgcoat SNF 2006-11-22 11:38:25: wafer broke in prime station
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Problem svgcoat SNF 2006-11-25 11:06:41: can't seem to get it to run in automatic; ran it in manual mode
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