From king at snf.stanford.edu Sun Oct 1 00:54:58 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sun, 1 Oct 2006 00:54:58 -0700 Subject: Problem svgcoat SNF 2006-10-01 00:54:57: Checking mail. Message-ID: I wrote up a comment for svgcoat2 and it bounced back undelivered. See if this works for svgcoat. From vilanova at snf.stanford.edu Mon Oct 2 07:40:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 07:40:51 -0700 Subject: Problem svgcoat SNF 2006-09-30 18:21:48: Load indexer will not descend. Message-ID: Indexer wasnt working because de HMDS canister Liquid level was low, Added HMDS, Indexer working Fine now. From vilanova at snf.stanford.edu Mon Oct 2 07:41:37 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 07:41:37 -0700 Subject: Problem svgcoat SNF 2006-10-01 00:54:57: Checking mail. Message-ID: the Track 2 Working Fine after minor adjustments. From vilanova at snf.stanford.edu Mon Oct 2 07:42:01 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 07:42:01 -0700 Subject: Problem svgcoat SNF 2006-09-30 17:32:56: no HMDS Message-ID: HMDS Added to canister. From vilanova at snf.stanford.edu Mon Oct 2 07:42:48 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 07:42:48 -0700 Subject: Problem svgcoat SNF 2006-09-30 23:05:28: non-uniform 1312 PR plus edge bead spray Message-ID: 1312? we dont have 1312 Resist , maybe i s3612 All checked them all. From vilanova at snf.stanford.edu Mon Oct 2 08:13:02 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 08:13:02 -0700 Subject: Problem svgcoat SNF 2006-09-28 09:35:02: with or without EBR Message-ID: Adjusted EBR Bottom And top cleaned Resist Dispense Noozle, Purged Line , Cycled wafers, no more Particles on wafer center, ready to use. From vilanova at snf.stanford.edu Mon Oct 2 08:13:21 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 08:13:21 -0700 Subject: Comment svgcoat SNF 2006-09-29 15:47:53: splash Message-ID: Back Splash Fixed. From vilanova at snf.stanford.edu Mon Oct 2 08:14:30 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 08:14:30 -0700 Subject: Problem svgcoat SNF 2006-09-30 23:13:33: non uniform coating of SPR 220 Message-ID: Cleaned and purged Line, Cycled wafers , ok to use ( remember to purge line every time you replace the resist bottle). From vilanova at snf.stanford.edu Mon Oct 2 08:14:48 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 08:14:48 -0700 Subject: Comment svgcoat SNF 2006-09-30 23:31:27: The shortened dispense time Message-ID: Comment cleared. From grahamab at snf.stanford.edu Mon Oct 2 09:18:18 2006 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 2 Oct 2006 09:18:18 -0700 Subject: Shutdown svgcoat SNF 2006-10-02 09:18:15: 1um resist not coating evenly Message-ID: Mahnaz said shutdown to be adjusted... From vilanova at snf.stanford.edu Mon Oct 2 11:00:53 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Oct 2006 11:00:53 -0700 Subject: Shutdown svgcoat SNF 2006-10-02 09:18:15: 1um resist not coating evenly Message-ID: adjusted Dispense Hose, cleaned exhaust system, adjusted EBR arm , cycled wafers, ok to use. From uyoon at snf.stanford.edu Mon Oct 2 17:14:42 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Mon, 2 Oct 2006 17:14:42 -0700 Subject: Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers. Message-ID: From vilanova at snf.stanford.edu Tue Oct 3 11:26:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Oct 2006 11:26:44 -0700 Subject: Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers. Message-ID: Replaced Resist Bottle with a Gallon of acetone purged line,Adjusted EBR Suck Back, cycled wafers ok to use, ( If in case this problem come back I will order a couple of EBR Needles. From iwjung at snf.stanford.edu Tue Oct 3 23:30:40 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Tue, 3 Oct 2006 23:30:40 -0700 Subject: Comment svgcoat SNF 2006-10-03 23:30:40: particle-like debris from 3612 1.0um Message-ID: From vilanova at snf.stanford.edu Wed Oct 4 08:18:24 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 Oct 2006 08:18:24 -0700 Subject: Comment svgcoat SNF 2006-10-03 23:30:40: particle-like debris from 3612 1.0um Message-ID: Purge the line before you use it or ran a couple of dummies because I saw a lot of air bubbles while dispensing, I just Purged Line and cycled wafers and wafer looks fine. From tura at snf.stanford.edu Wed Oct 4 13:21:42 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 4 Oct 2006 13:21:42 -0700 Subject: Problem svgcoat SNF 2006-10-04 13:21:41: PR coat doesn't look good at the edges Message-ID: I coated 2 wafers with 1.6um resist after priming in YES oven. There were areas at the edges where PR peeled off. From vilanova at snf.stanford.edu Thu Oct 5 09:31:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Oct 2006 09:31:07 -0700 Subject: Problem svgcoat SNF 2006-10-04 13:21:41: PR coat doesn't look good at the edges Message-ID: operator error, HMDS Yes oven and coater track working Fine, ok to use. From mahnaz at snf.stanford.edu Thu Oct 5 10:06:11 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 5 Oct 2006 10:06:11 -0700 Subject: Problem svgcoat SNF 2006-10-05 10:06:11: same old problem Message-ID: lots RBR splash in the center of the wafers. I would not run critical wafers. From mahnaz at snf.stanford.edu Thu Oct 5 16:55:21 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 5 Oct 2006 16:55:21 -0700 Subject: Problem svgcoat SNF 2006-10-05 16:55:21: do not run 1 and 1.6 um Message-ID: use back track for now, I think we found the problem. From vilanova at snf.stanford.edu Tue Oct 10 08:54:53 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Oct 2006 08:54:53 -0700 Subject: Problem svgcoat SNF 2006-10-05 16:55:21: do not run 1 and 1.6 um Message-ID: cleaned up Exhaust tubing & Butterfly , cycled wafers , ok to use. From vilanova at snf.stanford.edu Tue Oct 10 08:56:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Oct 2006 08:56:00 -0700 Subject: Problem svgcoat SNF 2006-10-05 10:06:11: same old problem Message-ID: cleaned up exhaust system , replaced catch cup , monthly PM performed, cleaned exhaust butterfly, adjusted EBR Suck back,Cycled wafers ok. From uyoon at snf.stanford.edu Wed Oct 11 16:57:13 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 11 Oct 2006 16:57:13 -0700 Subject: Problem svgcoat SNF 2006-10-11 16:57:12: Message-ID: still has a problem with EBR back splash in the center of the wafers. please use 1um resist on svg coater track2. Mario will work on it tomorrow. From vilanova at snf.stanford.edu Fri Oct 20 07:50:19 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 20 Oct 2006 07:50:19 -0700 Subject: Comment svgcoat SNF 2006-10-20 07:50:18: Parts On order Message-ID: The parts to fix the dispense for Program # 7 are on order ETA ( 10/ 23/06 ) From uyoon at snf.stanford.edu Wed Oct 25 10:18:52 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 25 Oct 2006 10:18:52 -0700 Subject: Comment svgcoat SNF 2006-10-25 10:18:51: Message-ID: Down program #7 - waiting for parts. From jscyb at snf.stanford.edu Sat Oct 28 23:35:34 2006 From: jscyb at snf.stanford.edu (jscyb at snf.stanford.edu) Date: Sat, 28 Oct 2006 23:35:34 -0700 Subject: Comment svgcoat SNF 2006-10-28 23:35:32: 'transfer stop' on prime oven will not go off Message-ID: when i push the start button, the 'transfer stop' button light on the prime oven still will not go out and transfer is suspended; it will sometimes work intermittently if i push the start button enough times, and if the wafer manages to get into the prime oven it is fine to the end of the svg coater. From mahnaz at snf.stanford.edu Tue Oct 31 12:06:22 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 31 Oct 2006 12:06:22 -0800 Subject: Shutdown svgcoat SNF 2006-10-31 12:06:21: vendor is working on the system. Message-ID: From mahnaz at snf.stanford.edu Tue Oct 31 17:09:32 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 31 Oct 2006 17:09:32 -0800 Subject: Shutdown svgcoat SNF 2006-10-31 12:06:21: vendor is working on the system. Message-ID: Pico track worked on the system, the arm program and the dispense has been adjusted. The EBR leak has been taken care of. The EBR splash in the center of the wafers has been taken care of. The exhaust has been cleared of debries. Please do not change or adjust anything. From mahnaz at snf.stanford.edu Tue Oct 31 17:09:50 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 31 Oct 2006 17:09:50 -0800 Subject: Comment svgcoat SNF 2006-10-28 23:35:32: 'transfer stop' on prime oven will not go off Message-ID: cleared From mahnaz at snf.stanford.edu Tue Oct 31 17:10:35 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 31 Oct 2006 17:10:35 -0800 Subject: Comment svgcoat SNF 2006-10-25 10:18:51: Message-ID: noted earlier From jackson at snf.stanford.edu Tue Oct 31 20:59:08 2006 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Tue, 31 Oct 2006 20:59:08 -0800 Subject: Problem svgcoat SNF 2006-10-31 20:59:08: program# 2 will not go from event 3 (dispense) into event 4 (spin) Message-ID: