Problem svgcoat SNF 2006-09-28 09:35:02: with or without EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 2 08:13:02 PDT 2006


Adjusted EBR Bottom And top cleaned Resist Dispense
Noozle, Purged Line , Cycled wafers, no more Particles
on wafer center, ready to use. 




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