Problem svgcoat SNF 2006-09-30 23:13:33: non uniform coating of SPR 220

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 2 08:14:30 PDT 2006


Cleaned and purged Line, Cycled wafers , ok to use
( remember to purge line every time you replace the 
resist bottle). 




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