Comment svgcoat SNF 2006-09-30 23:31:27: The shortened dispense time
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Oct 2 08:14:48 PDT 2006
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Problem svgcoat SNF 2006-09-30 23:13:33: non uniform coating of SPR 220
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Shutdown svgcoat SNF 2006-10-02 09:18:15: 1um resist not coating evenly
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Comment cleared.
Previous message:
Problem svgcoat SNF 2006-09-30 23:13:33: non uniform coating of SPR 220
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Shutdown svgcoat SNF 2006-10-02 09:18:15: 1um resist not coating evenly
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