Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers.
uyoon at snf.stanford.edu
uyoon at snf.stanford.edu
Mon Oct 2 17:14:42 PDT 2006
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Shutdown svgcoat SNF 2006-10-02 09:18:15: 1um resist not coating evenly
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Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers.
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Shutdown svgcoat SNF 2006-10-02 09:18:15: 1um resist not coating evenly
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Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers.
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