Comment svgcoat SNF 2006-10-03 23:30:40: particle-like debris from 3612 1.0um
iwjung at snf.stanford.edu
iwjung at snf.stanford.edu
Tue Oct 3 23:30:40 PDT 2006
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Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers.
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Comment svgcoat SNF 2006-10-03 23:30:40: particle-like debris from 3612 1.0um
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Problem svgcoat SNF 2006-10-02 17:14:41: still has some EBR splash in the center of the wafers.
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Comment svgcoat SNF 2006-10-03 23:30:40: particle-like debris from 3612 1.0um
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