Comment svgcoat SNF 2006-10-03 23:30:40: particle-like debris from 3612 1.0um

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Oct 4 08:18:24 PDT 2006


Purge the line before you use it or ran a couple of dummies
because I saw a lot of air bubbles while dispensing, I just
Purged Line and cycled wafers and  wafer looks fine.




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