Problem svgcoat SNF 2006-10-04 13:21:41: PR coat doesn't look good at the edges

tura at snf.stanford.edu tura at snf.stanford.edu
Wed Oct 4 13:21:42 PDT 2006


I coated 2 wafers with 1.6um resist after priming in YES oven. There were areas at the edges where PR peeled off.




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