Problem svgcoat SNF 2006-10-05 10:06:11: same old problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 10 08:56:00 PDT 2006


cleaned up exhaust system , replaced catch cup , monthly PM performed, cleaned exhaust butterfly, adjusted EBR Suck back,Cycled wafers ok. 




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