From vilanova at snf.stanford.edu Fri Sep 1 09:28:56 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Sep 2006 09:28:56 -0700 Subject: Problem svgcoat SNF 2006-08-31 16:21:55: ebr line dripping on wafer Message-ID: adjsuted EBR dispense , cycled wafers ok to use. From uyoon at snf.stanford.edu Wed Sep 6 10:35:46 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 6 Sep 2006 10:35:46 -0700 Subject: Problem svgcoat SNF 2006-09-06 10:35:45: ebr is not dispensing properly Message-ID: From vilanova at snf.stanford.edu Wed Sep 6 13:45:24 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Sep 2006 13:45:24 -0700 Subject: Problem svgcoat SNF 2006-09-06 10:35:45: ebr is not dispensing properly Message-ID: Adjusted EBR Valve flow, cycled wafers , ok to use. From vilanova at snf.stanford.edu Thu Sep 7 09:18:59 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Sep 2006 09:18:59 -0700 Subject: Shutdown svgcoat SNF 2006-09-07 09:18:58: weekly Pm ....................... Message-ID: Preventive maintenance In progress...... From vilanova at snf.stanford.edu Thu Sep 7 10:53:36 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Sep 2006 10:53:36 -0700 Subject: Shutdown svgcoat SNF 2006-09-07 09:18:58: weekly Pm ....................... Message-ID: Monthly Pm Completed, cleaned catch cup and spindle , cleaned exhaust system & recovery waste container, lubricated Indexers and dispense arm , refilled hmds canister cleaned secondary container , cycled wafers ready to use. From joongsun at snf.stanford.edu Thu Sep 7 14:04:16 2006 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Thu, 7 Sep 2006 14:04:16 -0700 Subject: Problem svgcoat SNF 2006-09-07 14:04:15: transportation problem Message-ID: SVG1 doesn't proceed to baking stage. From changyol at snf.stanford.edu Thu Sep 7 16:08:06 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 7 Sep 2006 16:08:06 -0700 Subject: Comment svgcoat SNF 2006-09-07 16:08:05: no bake step Message-ID: bake side wafer carrier does not move in to get wafer from coater. From vilanova at snf.stanford.edu Fri Sep 8 11:26:36 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Sep 2006 11:26:36 -0700 Subject: Shutdown svgcoat SNF 2006-09-08 11:26:36: Bad Drive belt Motor board Message-ID: Replaced motor , Drive board motor is bad , I,m waiting for vendor to bring me an Spare one , He will be here after Lunch . Stay tuned......... From vilanova at snf.stanford.edu Mon Sep 11 12:04:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Sep 2006 12:04:00 -0700 Subject: Problem svgcoat SNF 2006-09-07 14:04:15: transportation problem Message-ID: Replaced burned board, cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Sep 11 12:04:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Sep 2006 12:04:18 -0700 Subject: Comment svgcoat SNF 2006-09-07 16:08:05: no bake step Message-ID: please read previous message. From vilanova at snf.stanford.edu Mon Sep 11 12:04:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Sep 2006 12:04:40 -0700 Subject: Shutdown svgcoat SNF 2006-09-08 11:26:36: Bad Drive belt Motor board Message-ID: replaced drive motor and board, ok to use From vipin at snf.stanford.edu Tue Sep 12 18:19:40 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Tue, 12 Sep 2006 18:19:40 -0700 Subject: Problem svgcoat SNF 2006-09-12 18:19:39: problem Message-ID: 2mm EBR on prog 4 does not remove resists from the edges. It barely touches the wafer edges. From vilanova at snf.stanford.edu Wed Sep 13 08:06:19 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Sep 2006 08:06:19 -0700 Subject: Problem svgcoat SNF 2006-09-12 18:19:39: problem Message-ID: Adjusted EBR Arm POsition to 2mm for Program # 4, cycled wafers , ok to use From vilanova at snf.stanford.edu Fri Sep 15 16:01:32 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Sep 2006 16:01:32 -0700 Subject: Comment svgcoat SNF 2006-09-15 16:01:31: Thick resist dispense has been adjusted. Message-ID: Thick resist dispense has been adjusted please do not change the seetings. From king at snf.stanford.edu Fri Sep 15 17:08:13 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 15 Sep 2006 17:08:13 -0700 Subject: Problem svgcoat SNF 2006-09-15 17:08:13: Particles Message-ID: Used acetone and multiple dispense cleanups and particles still show up on fresh wafers. Recommend running a test wafer first. maybe they'll clear up with use. From vipin at snf.stanford.edu Fri Sep 15 18:11:09 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 15 Sep 2006 18:11:09 -0700 Subject: Problem svgcoat SNF 2006-09-15 18:11:09: problem Message-ID: EBR does not work in Pgm 4. Arm never moves. The coating also starts from half way to the wafer instead of the edge. From vilanova at snf.stanford.edu Mon Sep 18 08:08:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Sep 2006 08:08:46 -0700 Subject: Problem svgcoat SNF 2006-09-15 18:11:09: problem Message-ID: program 4 working fine , dispense is good and also the uniformity , EBR working great 2mm, Cycled wafers ok to use. From vilanova at snf.stanford.edu Mon Sep 18 08:08:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Sep 2006 08:08:58 -0700 Subject: Comment svgcoat SNF 2006-09-15 16:01:31: Thick resist dispense has been adjusted. Message-ID: cleared comment. From vilanova at snf.stanford.edu Mon Sep 18 08:29:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Sep 2006 08:29:00 -0700 Subject: Problem svgcoat SNF 2006-09-15 17:08:13: Particles Message-ID: adjusted EBR Flow, cycled wafers , ok to use. From ankushg at snf.stanford.edu Mon Sep 18 14:17:29 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 18 Sep 2006 14:17:29 -0700 Subject: Problem svgcoat SNF 2006-09-18 14:17:29: Lot of EBR backsplash. It needs urgent attention. Message-ID: From vilanova at snf.stanford.edu Mon Sep 18 14:49:13 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Sep 2006 14:49:13 -0700 Subject: Problem svgcoat SNF 2006-09-18 14:17:29: Lot of EBR backsplash. It needs urgent attention. Message-ID: Adjusted EBR Flow and EBR suck back , cycled wafers , ready to use. From mahnaz at snf.stanford.edu Wed Sep 27 15:05:51 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 27 Sep 2006 15:05:51 -0700 Subject: Problem svgcoat SNF 2006-09-27 15:05:50: sever problem with EBR Message-ID: we bad result with or without the EBR From huangzb at snf.stanford.edu Thu Sep 28 02:08:37 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 28 Sep 2006 02:08:37 -0700 Subject: Problem svgcoat SNF 2006-09-28 02:08:37: very bad result with SPR220 coating Message-ID: Very bad result for SPR 220 coating. There were some air bubbles formed in the supplying tube for SPR 220 and the coating is not uniform. From changyol at snf.stanford.edu Thu Sep 28 08:03:36 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 28 Sep 2006 08:03:36 -0700 Subject: Problem svgcoat SNF 2006-09-27 15:05:50: sever problem with EBR Message-ID: machine seem to be fine. From changyol at snf.stanford.edu Thu Sep 28 08:05:00 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 28 Sep 2006 08:05:00 -0700 Subject: Problem svgcoat SNF 2006-09-28 02:08:37: very bad result with SPR220 coating Message-ID: spr220 ran out . put new spr220 in. From mahnaz at snf.stanford.edu Thu Sep 28 09:35:03 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Sep 2006 09:35:03 -0700 Subject: Problem svgcoat SNF 2006-09-28 09:35:02: with or without EBR Message-ID: I see EBR splash in the center. I will not run critical work. Exhoust is most likely block. From changyol at snf.stanford.edu Fri Sep 29 15:47:53 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Fri, 29 Sep 2006 15:47:53 -0700 Subject: Comment svgcoat SNF 2006-09-29 15:47:53: splash Message-ID: I noticed angle of ebr tip was not enoght to prevent splash, so I adjusted more tilt toward out direction. anyone can try machine and give some comment. From ofidaner at snf.stanford.edu Sat Sep 30 17:32:58 2006 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Sat, 30 Sep 2006 17:32:58 -0700 Subject: Problem svgcoat SNF 2006-09-30 17:32:56: no HMDS Message-ID: From lindaw at snf.stanford.edu Sat Sep 30 18:21:48 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 30 Sep 2006 18:21:48 -0700 Subject: Problem svgcoat SNF 2006-09-30 18:21:48: Load indexer will not descend. Message-ID: won't load wafers. From king at snf.stanford.edu Sat Sep 30 23:05:31 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 30 Sep 2006 23:05:31 -0700 Subject: Problem svgcoat SNF 2006-09-30 23:05:28: non-uniform 1312 PR plus edge bead spray Message-ID: The spray is all over the center of the wafer. From huangzb at snf.stanford.edu Sat Sep 30 23:13:36 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 30 Sep 2006 23:13:36 -0700 Subject: Problem svgcoat SNF 2006-09-30 23:13:33: non uniform coating of SPR 220 Message-ID: Could see some particles in the photoresist on the wafer after coating From king at snf.stanford.edu Sat Sep 30 23:31:28 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 30 Sep 2006 23:31:28 -0700 Subject: Comment svgcoat SNF 2006-09-30 23:31:27: The shortened dispense time Message-ID: may be causing this non-uniformity. It's just very marginal. Maybe some tests should be done.