Shutdown svgcoat SNF 2006-09-07 09:18:58: weekly Pm .......................

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 7 10:53:36 PDT 2006


Monthly Pm Completed, cleaned catch cup and spindle ,
cleaned exhaust system & recovery waste container, 
lubricated  Indexers and dispense arm , refilled hmds 
canister cleaned secondary container , cycled wafers
ready to use. 




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