Problem svgcoat SNF 2006-09-15 18:11:09: problem

vipin at snf.stanford.edu vipin at snf.stanford.edu
Fri Sep 15 18:11:09 PDT 2006


EBR does not work in Pgm 4. Arm never moves. The coating also starts from half way to the wafer instead of the edge.




More information about the svgcoat-pcs mailing list