Problem svgcoat SNF 2006-09-30 23:13:33: non uniform coating of SPR 220

huangzb at snf.stanford.edu huangzb at snf.stanford.edu
Sat Sep 30 23:13:36 PDT 2006


Could see some particles in the photoresist on the wafer after coating




More information about the svgcoat-pcs mailing list