From vilanova at snf.stanford.edu Mon Apr 2 07:12:50 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Apr 2007 07:12:50 -0700 Subject: Comment svgcoat SNF 2007-03-31 13:46:56: Program Message-ID: Operator error, I've checked all the programs I cycled wafers for each one of them and I could not see a problem with them, ok to use. From mahnaz at snf.stanford.edu Tue Apr 3 11:14:15 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 Apr 2007 11:14:15 -0700 Subject: Problem svgcoat SNF 2007-04-03 11:14:14: I like the back side EBR to be checked Message-ID: Not sure if is giving enough. From vilanova at snf.stanford.edu Wed Apr 4 07:49:59 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 Apr 2007 07:49:59 -0700 Subject: Problem svgcoat SNF 2007-04-03 11:14:14: I like the back side EBR to be checked Message-ID: Bottom Side EBR adjusted , Cycled wafers , Good to use. From sjo at snf.stanford.edu Sat Apr 14 20:10:13 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Sat, 14 Apr 2007 20:10:13 -0700 Subject: Problem svgcoat SNF 2007-04-14 20:10:12: SPR220-7 is bad Message-ID: There's never a uniform coat, no matter what thickness (7, 10 or 15 micron). One reason I suspect is that the resist bottle in the cabinet is open to the atmosphere - where the supply line enters the resist bottle lid, there is a pretty big gap, allowing the solvent to escape. If the resist is slowly thickening in that bottle, that could be the reason for the non-uniform coatings I see. From vilanova at snf.stanford.edu Mon Apr 16 10:32:30 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Apr 2007 10:32:30 -0700 Subject: Problem svgcoat SNF 2007-04-14 20:10:12: SPR220-7 is bad Message-ID: checked the spr220-7 resist cap (Looks normal just the same way it has been for years, Purged line cleaned nozzle , adjusted dispense hose Cycled wafers 3.50 Speed , 1.70 for programs 4 & 6. Ok to use. From hongxu at snf.stanford.edu Mon Apr 16 16:27:57 2007 From: hongxu at snf.stanford.edu (hongxu at snf.stanford.edu) Date: Mon, 16 Apr 2007 16:27:57 -0700 Subject: Comment svgcoat SNF 2007-04-16 16:27:57: svg prog#4 Message-ID: suckback dripping! From vilanova at snf.stanford.edu Tue Apr 17 08:11:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Apr 2007 08:11:10 -0700 Subject: Comment svgcoat SNF 2007-04-16 16:27:57: svg prog#4 Message-ID: We have cycled wafers ( program # 4 ) and we could not repeat the problem , suck back for program # 4 working fine. ok to use. From iwygant at snf.stanford.edu Wed Apr 18 15:12:34 2007 From: iwygant at snf.stanford.edu (iwygant at snf.stanford.edu) Date: Wed, 18 Apr 2007 15:12:34 -0700 Subject: Problem svgcoat SNF 2007-04-18 15:12:33: Transfer Issues Message-ID: Wafers keep stopping and not transferringly properly even though it's on auto. From vilanova at snf.stanford.edu Fri Apr 20 07:45:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 20 Apr 2007 07:45:40 -0700 Subject: Problem svgcoat SNF 2007-04-18 15:12:33: Transfer Issues Message-ID: cycled all the dummy wafers from the box and I could not repeat the problem, transfer indexers are working fine. From jsuarez at snf.stanford.edu Mon Apr 30 09:45:15 2007 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 30 Apr 2007 09:45:15 -0700 Subject: Problem svgcoat SNF 2007-04-30 09:45:14: 2mm EBR too narrow, looks like 1mm only Message-ID: From gsosa at snf.stanford.edu Mon Apr 30 11:34:13 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 30 Apr 2007 11:34:13 -0700 Subject: Problem svgcoat SNF 2007-04-30 09:45:14: 2mm EBR too narrow, looks like 1mm only Message-ID: Checked EBR and adjusted for 2 mm width. Also verified 5mm EBR width. All OK.