Problem svgcoat SNF 2007-04-14 20:10:12: SPR220-7 is bad

sjo at snf.stanford.edu sjo at snf.stanford.edu
Sat Apr 14 20:10:13 PDT 2007


There's never a uniform coat, no matter what thickness (7, 10 or 15 micron). One reason I suspect is that the resist bottle in the cabinet is open to the atmosphere - where the supply line enters the resist bottle lid, there is a pretty big gap, allowing the solvent to escape. If the resist is slowly thickening in that bottle, that could be the reason for the non-uniform coatings I see.




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