Problem svgcoat SNF 2007-04-14 20:10:12: SPR220-7 is bad

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 16 10:32:30 PDT 2007


checked the spr220-7 resist cap (Looks normal just the same way it has been for years,
Purged line cleaned nozzle , adjusted dispense hose
Cycled wafers 3.50 Speed , 1.70  for programs 4 & 6. 
Ok to use. 




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