From lindaw at snf.stanford.edu Sat Aug 4 15:15:27 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 4 Aug 2007 15:15:27 -0700 Subject: Comment svgcoat SNF 2007-08-04 15:15:27: both tracks are clean. Message-ID: From nevran at snf.stanford.edu Wed Aug 8 13:38:44 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Wed, 8 Aug 2007 13:38:44 -0700 Subject: Problem svgcoat SNF 2007-08-08 13:38:39: 7um resist leaving marks on wafer Message-ID: even after cleaning tip of dispenser with q-tips and acetone, and doing a dump-rinse/spin-dry before running wafers From vilanova at snf.stanford.edu Wed Aug 8 14:54:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:54:24 -0700 Subject: Comment svgcoat SNF 2007-08-04 15:15:27: both tracks are clean. Message-ID: cleared comment. From vilanova at snf.stanford.edu Wed Aug 8 14:55:20 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:55:20 -0700 Subject: Problem svgcoat SNF 2007-08-08 13:38:39: 7um resist leaving marks on wafer Message-ID: cleaned catch cup and spindle adjusted Exhaust system , cleaned wafer travel belts chuck , adjusted and cleaned EBR arm , Cycled wafers , ok to use. From uli at snf.stanford.edu Fri Aug 10 10:58:52 2007 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 10 Aug 2007 10:58:52 -0700 Subject: Comment svgcoat SNF 2007-08-10 10:58:52: updated program sheet Message-ID: Prog #5 is now programmed for the I Line resist SPR 955-CM.7 to ge 0.7 to 1 um resist. From mahnaz at snf.stanford.edu Thu Aug 16 11:32:59 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 16 Aug 2007 11:32:59 -0700 Subject: Problem svgcoat SNF 2007-08-16 11:32:59: I line resist pro #5 Message-ID: bad spin on 23 wfs, we need to change the line. From gsosa at snf.stanford.edu Thu Aug 16 13:44:19 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 16 Aug 2007 13:44:19 -0700 Subject: Comment svgcoat SNF 2007-08-16 13:44:19: I-Line resist, Dispense 3 Message-ID: We will be changing the shortened dispense line for the I-Line resist tomorrow between 6:30 and 8:30 AM. The tool will be unavailable at this time. GS From jrjain at snf.stanford.edu Fri Aug 17 09:41:07 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 17 Aug 2007 09:41:07 -0700 Subject: Problem svgcoat SNF 2007-08-17 09:41:06: Several problems Message-ID: Bad uniformity on nearly every wafer. EBR backsplash within 10mm of edge From mahnaz at snf.stanford.edu Fri Aug 17 09:42:26 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Aug 2007 09:42:26 -0700 Subject: Problem svgcoat SNF 2007-08-17 09:42:25: i line resist dispense very fast Message-ID: non uniform , no good at all. From mahnaz at snf.stanford.edu Fri Aug 17 14:24:30 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Aug 2007 14:24:30 -0700 Subject: Problem svgcoat SNF 2007-08-17 14:24:30: I line prog #5 non uniform Message-ID: From mahnaz at snf.stanford.edu Fri Aug 17 14:25:00 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Aug 2007 14:25:00 -0700 Subject: Problem svgcoat SNF 2007-08-17 14:24:59: 3612 too much dispense ,need adjustment Message-ID: From vilanova at snf.stanford.edu Mon Aug 20 08:07:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:07:43 -0700 Subject: Problem svgcoat SNF 2007-08-16 11:32:59: I line resist pro #5 Message-ID: Replaced line, Adjusted pump settings, Cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Aug 20 08:07:58 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:07:58 -0700 Subject: Comment svgcoat SNF 2007-08-16 13:44:19: I-Line resist, Dispense 3 Message-ID: Replaced line, Adjusted pump settings, Cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Aug 20 08:08:13 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:08:13 -0700 Subject: Problem svgcoat SNF 2007-08-17 09:42:25: i line resist dispense very fast Message-ID: Replaced line, Adjusted pump settings, Cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Aug 20 08:08:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:08:24 -0700 Subject: Problem svgcoat SNF 2007-08-17 14:24:30: I line prog #5 non uniform Message-ID: Replaced line, Adjusted pump settings, Cycled wafers, ok to use. From vilanova at snf.stanford.edu Mon Aug 20 08:09:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:09:11 -0700 Subject: Problem svgcoat SNF 2007-08-17 09:41:06: Several problems Message-ID: Adjusted Dispense Flow, Cleaned Catch cup, Adjusted exhaust , Cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Aug 20 08:09:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:09:21 -0700 Subject: Problem svgcoat SNF 2007-08-17 14:24:59: 3612 too much dispense ,need adjustment Message-ID: Adjusted Dispense Flow, Cleaned Catch cup, Adjusted exhaust , Cycled wafers , ok to use. From masaharu at snf.stanford.edu Mon Aug 20 19:05:41 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Mon, 20 Aug 2007 19:05:41 -0700 Subject: Problem svgcoat SNF 2007-08-20 19:05:41: belt does not move? Message-ID: The belt of input port does not move and carry wafers. From vilanova at snf.stanford.edu Tue Aug 21 07:34:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 07:34:57 -0700 Subject: Problem svgcoat SNF 2007-08-20 19:05:41: belt does not move? Message-ID: cycled and cleaned all the dummy wafers ( 17 Each ) I could not repeat the problem, all the belts are working correctly. Ok to use. From maryamzm at snf.stanford.edu Tue Aug 21 11:22:19 2007 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Tue, 21 Aug 2007 11:22:19 -0700 Subject: Problem svgcoat SNF 2007-08-21 11:22:19: huge streaking problem Message-ID: The I-line resist (Program #5) has coating problems. I got huge streaks on both the edge and center of the wafer. I ran 4 dummies and then 10 wafers and the problem was consistent...had to remove the resist on all wafers. I did notice back EBR splash. From vilanova at snf.stanford.edu Tue Aug 21 11:52:39 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 11:52:39 -0700 Subject: Problem svgcoat SNF 2007-08-21 11:22:19: huge streaking problem Message-ID: adjusted dispense rate and suck back , cycled wafers ok to use. From mahnaz at snf.stanford.edu Tue Aug 21 14:43:55 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:43:55 -0700 Subject: Problem svgcoat SNF 2007-08-21 14:43:54: 3612 too fast of dispense, no good Message-ID: From mahnaz at snf.stanford.edu Tue Aug 21 14:46:14 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:46:14 -0700 Subject: Problem svgcoat SNF 2007-08-21 14:46:14: dispense is too fast, non uniform Message-ID: From mahnaz at snf.stanford.edu Tue Aug 21 15:17:56 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:17:56 -0700 Subject: Problem svgcoat SNF 2007-08-21 15:17:55: 2 wafers 2 out of 4 wfs came out with bad EBR back splash Message-ID: I had cleaned the nozzel and ran 6 dummies. From gsosa at snf.stanford.edu Wed Aug 22 09:07:11 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Aug 2007 09:07:11 -0700 Subject: Shutdown svgcoat SNF 2007-08-22 09:07:10: Poor spin Issues Message-ID: System is down. Working on poor spin issues. GS From gsosa at snf.stanford.edu Wed Aug 22 15:30:53 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Aug 2007 15:30:53 -0700 Subject: Shutdown svgcoat SNF 2007-08-22 09:07:10: Poor spin Issues Message-ID: 3612 resist- Centered nozzle( nozzle 1) to center of chuck. changed arm program for resist sweep and coverage. Adjusted pump stroke length and speed. Adjusted suckback. 955 .7 resist- changed arm program during dispense from 9(center to edge) to 1 which is a static dispense at center of wafer.EBR splashback- adjusted backside flow for better wafer contact(verigied with glass wafer). Adjusted top ebr nozzle position closer to wafer. Both resist programs OK to use. GS From gsosa at snf.stanford.edu Wed Aug 22 15:33:10 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Aug 2007 15:33:10 -0700 Subject: Problem svgcoat SNF 2007-08-21 14:43:54: 3612 too fast of dispense, no good Message-ID: Adjusted pump stroke length and speed. Adjusted suckback. From gsosa at snf.stanford.edu Wed Aug 22 15:33:50 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Aug 2007 15:33:50 -0700 Subject: Problem svgcoat SNF 2007-08-21 14:46:14: dispense is too fast, non uniform Message-ID: Adjusted 3612 pump stroke length and speed. Adjusted suckback. From gsosa at snf.stanford.edu Wed Aug 22 15:37:33 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Aug 2007 15:37:33 -0700 Subject: Problem svgcoat SNF 2007-08-21 15:17:55: 2 wafers 2 out of 4 wfs came out with bad EBR back splash Message-ID: Track ok to use. see next comments from shutdown 8/22/2007 GS From gyama at snf.stanford.edu Thu Aug 23 08:44:44 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:44:44 -0700 Subject: Comment svgcoat SNF 2007-08-23 08:44:43: HMDS alarm Message-ID: From mtang at snf.stanford.edu Thu Aug 23 09:32:57 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Aug 2007 09:32:57 -0700 Subject: Problem svgcoat SNF 2007-08-23 09:32:56: Thickness check needs to be done Message-ID: System is fine, but needs thickness check on 3612 and 955. From gyama at snf.stanford.edu Thu Aug 23 09:41:05 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 23 Aug 2007 09:41:05 -0700 Subject: Shutdown svgcoat SNF 2007-08-23 09:41:05: load indexer will not go down Message-ID: From vilanova at snf.stanford.edu Thu Aug 23 10:37:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Aug 2007 10:37:45 -0700 Subject: Shutdown svgcoat SNF 2007-08-23 09:41:05: load indexer will not go down Message-ID: Adjusted Wafer Sensor Indexer sender, cycled tested wafer , ok to use. From vilanova at snf.stanford.edu Thu Aug 23 10:37:54 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Aug 2007 10:37:54 -0700 Subject: Comment svgcoat SNF 2007-08-23 08:44:43: HMDS alarm Message-ID: Adjusted Wafer Sensor Indexer sender, cycled tested wafer , ok to use. From maryamzm at snf.stanford.edu Thu Aug 23 21:12:38 2007 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Thu, 23 Aug 2007 21:12:38 -0700 Subject: Problem svgcoat SNF 2007-08-23 21:12:38: streaking problem Message-ID: There are a lot of streaks on the wafer using the I-line resist (program 5). From gsosa at snf.stanford.edu Fri Aug 24 09:46:08 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Aug 2007 09:46:08 -0700 Subject: Problem svgcoat SNF 2007-08-23 21:12:38: streaking problem Message-ID: Checked and adjusted suckback. Ran many dummies-OK. ASM-L wafers also came out good. GS From mahnaz at snf.stanford.edu Fri Aug 24 11:36:12 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 24 Aug 2007 11:36:12 -0700 Subject: Problem svgcoat SNF 2007-08-23 09:32:56: Thickness check needs to be done Message-ID: Gary measured both resist 3612 and 955-.7 resist and both are within the spec. I iwll put a copy of it in the binder next to the system. From jrjain at snf.stanford.edu Sat Aug 25 01:20:02 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sat, 25 Aug 2007 01:20:02 -0700 Subject: Problem svgcoat SNF 2007-08-25 01:20:02: Cooling station sensor failure Message-ID: Wafer overshoots sensor on cooling station. Part of wafer is left to cool hanging off the edge towards the receiver cassette. From fengj at snf.stanford.edu Sat Aug 25 02:00:41 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 25 Aug 2007 02:00:41 -0700 Subject: Problem svgcoat SNF 2007-08-25 02:00:40: 955 resist looks rough on the edge of wafer Message-ID: Coated 0.7-um 955 resist. Some wafers looks very rough on the edge. It seems to be the problem that happened in January when we do EE410 wafers with 3612 resist. From vilanova at snf.stanford.edu Mon Aug 27 07:52:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Aug 2007 07:52:18 -0700 Subject: Problem svgcoat SNF 2007-08-25 01:20:02: Cooling station sensor failure Message-ID: Cycled wafers , Cooling sensor working FIne, I couldnt repeat the user problem, From vilanova at snf.stanford.edu Mon Aug 27 08:03:51 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Aug 2007 08:03:51 -0700 Subject: Problem svgcoat SNF 2007-08-25 02:00:40: 955 resist looks rough on the edge of wafer Message-ID: I've adjusted the dispense rate and cycled 10 wafers , they all look good but we will keep an eye on it, I will run more test wafers later today. From gth at snf.stanford.edu Mon Aug 27 12:19:18 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 27 Aug 2007 12:19:18 -0700 Subject: Problem svgcoat SNF 2007-08-27 12:19:18: 1u resist bad Message-ID: hole at the center, uneven spread, ran 3 dummies, all failed insufficent resisit i guess From gibby at snf.stanford.edu Mon Aug 27 22:04:09 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Mon, 27 Aug 2007 22:04:09 -0700 Subject: Problem svgcoat SNF 2007-08-27 22:04:09: Air Gap in 955 line Message-ID: There was a large air gap at the top of the 955 line. After running 3 dummy wafers, the air gap was gone and resist dispensed normally. From mahnaz at snf.stanford.edu Tue Aug 28 15:42:43 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 28 Aug 2007 15:42:43 -0700 Subject: Problem svgcoat SNF 2007-08-28 15:42:42: nonuniform resist Message-ID: Mario worked on it and improved but every few wafers the problem is back. I think that the nozzle needs to be supported half way. From saurabhc at snf.stanford.edu Wed Aug 29 01:33:54 2007 From: saurabhc at snf.stanford.edu (saurabhc at snf.stanford.edu) Date: Wed, 29 Aug 2007 01:33:54 -0700 Subject: Problem svgcoat SNF 2007-08-29 01:33:54: Speckled and streaked 1.6 um resist Message-ID: Program 8 for 1.6um with edge bead removal resulted in speckled (perhaps bubbles) and streaked coating. From gsosa at snf.stanford.edu Wed Aug 29 16:11:09 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Aug 2007 16:11:09 -0700 Subject: Problem svgcoat SNF 2007-08-29 01:33:54: Speckled and streaked 1.6 um resist Message-ID: Adjusted arm timing for better center to edge resist coverage. From gsosa at snf.stanford.edu Wed Aug 29 16:12:40 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Aug 2007 16:12:40 -0700 Subject: Problem svgcoat SNF 2007-08-27 12:19:18: 1u resist bad Message-ID: See comments on entry 8/29/07.