From vilanova at snf.stanford.edu Thu Feb 1 08:20:22 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Feb 2007 08:20:22 -0800 Subject: Problem svgcoat SNF 2007-01-31 16:30:39: Spewing junk in the PR Message-ID: Firstable I found a lot of resist all over the spindle and the spindle motor, someone has been mesing up with the EBR settings , I also found the Exhaust BUtterfly in a closed position ( that's why we were getting a lot of junk all over the wafers ) I adjusted everything and also cleaned everything I performed the MOnthly PM on the track cycle wafers and they all look Great , PLEASE BE CAREFUL WHILE DISPENSING YOUR RESIST ON MANUAL MODE , I DONT WANT TO SEE THE TRACK GOING DOWN HARD BECAUSE OF THAT, Ok to use. From ee410d at snf.stanford.edu Fri Feb 9 10:02:58 2007 From: ee410d at snf.stanford.edu (ee410d at snf.stanford.edu) Date: Fri, 9 Feb 2007 10:02:58 -0800 Subject: Comment svgcoat SNF 2007-02-09 10:02:57: coating is streaky Message-ID: From sdogbe at snf.stanford.edu Fri Feb 9 10:13:40 2007 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Fri, 9 Feb 2007 10:13:40 -0800 Subject: Problem svgcoat SNF 2007-02-09 10:13:40: No resist Message-ID: Coater could not dispense resist. From vilanova at snf.stanford.edu Fri Feb 9 14:33:08 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Feb 2007 14:33:08 -0800 Subject: Problem svgcoat SNF 2007-02-09 10:13:40: No resist Message-ID: all the resist are working fine , I just ran wafers using all programs and everything is fine, I dont know what this person was doing or trying to do. ok to use. From vilanova at snf.stanford.edu Fri Feb 9 14:33:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Feb 2007 14:33:47 -0800 Subject: Comment svgcoat SNF 2007-02-09 10:02:57: coating is streaky Message-ID: Purged line cleaned dispense hose and cycled wafers , ok to use. From gibby at snf.stanford.edu Wed Feb 14 18:31:08 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 14 Feb 2007 18:31:08 -0800 Subject: Problem svgcoat SNF 2007-02-14 18:31:07: Track is not dispensing smoothly on program 7 Message-ID: From vilanova at snf.stanford.edu Thu Feb 15 10:15:33 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Feb 2007 10:15:33 -0800 Subject: Problem svgcoat SNF 2007-02-14 18:31:07: Track is not dispensing smoothly on program 7 Message-ID: there was a lot of air bubbles in the line I think someone replaced the bottle and didnt purge the line or it wasnt purged it properly , I purged line cleaned dispense hose and cycled wafer , Wafer looks good , system good to use. From ee410d at snf.stanford.edu Thu Feb 15 22:11:56 2007 From: ee410d at snf.stanford.edu (ee410d at snf.stanford.edu) Date: Thu, 15 Feb 2007 22:11:56 -0800 Subject: Problem svgcoat SNF 2007-02-15 22:11:56: spewing junk Message-ID: From vilanova at snf.stanford.edu Fri Feb 16 07:53:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Feb 2007 07:53:11 -0800 Subject: Problem svgcoat SNF 2007-02-15 22:11:56: spewing junk Message-ID: Purged line cleaned the dispense hose cycled wafers, ok to use, I could not repeat the last user problem after All. From huangzb at snf.stanford.edu Wed Feb 21 23:52:21 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Wed, 21 Feb 2007 23:52:21 -0800 Subject: Problem svgcoat SNF 2007-02-21 23:52:20: small bubbles and spikes found with prog 4 10um SPR220 Message-ID: small bubbles and spikes found with prog 4 10um SPR220 after 5 dummy wafers. From vilanova at snf.stanford.edu Thu Feb 22 14:06:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 Feb 2007 14:06:31 -0800 Subject: Problem svgcoat SNF 2007-02-21 23:52:20: small bubbles and spikes found with prog 4 10um SPR220 Message-ID: I cleaned nozzle and purged line , cycled wafers , ok to use .