Problem svgcoat SNF 2007-01-31 16:30:39: Spewing junk in the PR

[vilanova at snf.stanford.edu]

Firstable I found a lot of resist all over the spindle and the 
spindle motor, someone has been mesing up with the EBR 
settings , I also found the Exhaust BUtterfly in a  closed 
position ( that's why we were getting a lot of junk all over
the wafers ) I adjusted everything and also cleaned everything
I performed the MOnthly PM on the track cycle wafers and they  
all look Great ,  PLEASE BE CAREFUL WHILE DISPENSING
YOUR RESIST ON MANUAL MODE , I DONT WANT TO SEE THE TRACK GOING DOWN HARD BECAUSE OF THAT, Ok to use.