Problem svgcoat SNF 2007-02-21 23:52:20: small bubbles and spikes found with prog 4 10um SPR220

huangzb at snf.stanford.edu huangzb at snf.stanford.edu
Wed Feb 21 23:52:21 PST 2007


small bubbles and spikes found with prog 4 10um SPR220 after 5 dummy wafers.




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