From vilanova at snf.stanford.edu Tue Jan 2 14:04:41 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Jan 2007 14:04:41 -0800 Subject: Shutdown svgcoat SNF 2007-01-02 14:04:40: Board Failure Message-ID: We are experiencing some Board Failure on both systems. From mahnaz at snf.stanford.edu Tue Jan 2 16:02:16 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Jan 2007 16:02:16 -0800 Subject: Comment svgcoat SNF 2007-01-02 16:02:16: might be the back up battery Message-ID: checked all the arm program, all ok. From mahnaz at snf.stanford.edu Fri Jan 5 17:12:29 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 5 Jan 2007 17:12:29 -0800 Subject: Shutdown svgcoat SNF 2007-01-02 14:04:40: Board Failure Message-ID: From mahnaz at snf.stanford.edu Fri Jan 5 17:20:32 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 5 Jan 2007 17:20:32 -0800 Subject: Comment svgcoat SNF 2007-01-02 16:02:16: might be the back up battery Message-ID: solenoid valves has been changed. Few fuses for HMDS has been replaced. Calibrated the hot plates and the spindles. adjusted the pump flow and reentered all the setting for the 220-7 controller as they were lost after shut down. I tested the system for thickness nd uniformity on 1 um and 1.6 um are with in the spec. 7 um resist thickness is within the spec but the uniformity is not as good as i like it tobe. FSE will be back on Monday for that, Mario is still in the lab working with them. I will up date the note book on Monday From sjo at snf.stanford.edu Mon Jan 8 00:08:26 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Mon, 8 Jan 2007 00:08:26 -0800 Subject: Problem svgcoat SNF 2007-01-08 00:08:24: EBR stops too short on Prog 8 Message-ID: Prog 8 with 2mm EBR has too little EBR - it is more like 0.1 or no EBR at all. A little adjustment of the nozzle should fix this easily. From mahnaz at snf.stanford.edu Mon Jan 8 15:06:56 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 8 Jan 2007 15:06:56 -0800 Subject: Problem svgcoat SNF 2007-01-08 00:08:24: EBR stops too short on Prog 8 Message-ID: Jim haydon helped to adjust the EBR and connect the back side EBR. DO NOT PLAY with EBR NOZZEL. From mahnaz at snf.stanford.edu Mon Jan 8 15:08:13 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 8 Jan 2007 15:08:13 -0800 Subject: Problem svgcoat SNF 2007-01-08 15:08:12: 7 um thickness is within spec but Message-ID: uniformity not that good. I had accidentaly reported that on SVG2 From mahnaz at snf.stanford.edu Mon Jan 8 15:09:40 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 8 Jan 2007 15:09:40 -0800 Subject: Problem svgcoat SNF 2007-01-08 15:09:40: 7 um needs to be worked on Message-ID: From huangzb at snf.stanford.edu Tue Jan 9 04:30:42 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 9 Jan 2007 04:30:42 -0800 Subject: Shutdown svgcoat SNF 2007-01-09 04:30:42: Track 1 HMDS Message-ID: HMDS at track 1 is empty From vilanova at snf.stanford.edu Tue Jan 9 09:19:09 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Jan 2007 09:19:09 -0800 Subject: Shutdown svgcoat SNF 2007-01-09 04:30:42: Track 1 HMDS Message-ID: HMDS Canister was a little low level, Added HMDS to canister , Ok to use. I also Adjusted the EBR for Programs # 7 and # 8 2mm EBR working Great! Uija Cycled wafers , ok to use. From vilanova at snf.stanford.edu Tue Jan 9 10:41:16 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Jan 2007 10:41:16 -0800 Subject: Problem svgcoat SNF 2007-01-08 15:08:12: 7 um thickness is within spec but Message-ID: I've adjusted the dispense rate for the thick resist program I Cycled many wafers , Uniformity Looks great, Ok to use. From vilanova at snf.stanford.edu Tue Jan 9 10:41:33 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Jan 2007 10:41:33 -0800 Subject: Problem svgcoat SNF 2007-01-08 15:09:40: 7 um needs to be worked on Message-ID: Please read previous message. From dgunning at snf.stanford.edu Tue Jan 9 11:48:30 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Tue, 9 Jan 2007 11:48:30 -0800 Subject: Problem svgcoat SNF 2007-01-09 11:48:30: wafers sticking Message-ID: 1.1mm glass wafers were getting stuck part way into receiving cassette. Final wafer also stuck at primer station...wouldn't move onto resist station. Now cannot get first cassette holder to rise up fully. From vilanova at snf.stanford.edu Tue Jan 9 13:51:59 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Jan 2007 13:51:59 -0800 Subject: Problem svgcoat SNF 2007-01-09 11:48:30: wafers sticking Message-ID: cleaned hotplate, Cycled wafers System ok , I could not repeat the problem . From mislam at snf.stanford.edu Tue Jan 9 15:55:40 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 9 Jan 2007 15:55:40 -0800 Subject: Problem svgcoat SNF 2007-01-09 15:55:40: boken wafer in prime module Message-ID: wafer broke in pieces in while the prime From uyoon at snf.stanford.edu Tue Jan 9 17:53:02 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 9 Jan 2007 17:53:02 -0800 Subject: Comment svgcoat SNF 2007-01-09 17:53:01: Message-ID: Broken wafer pie From uyoon at snf.stanford.edu Tue Jan 9 17:54:44 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 9 Jan 2007 17:54:44 -0800 Subject: Comment svgcoat SNF 2007-01-09 17:54:44: Message-ID: Broken wafer peices have been cleaned up by Jim Haydon From vilanova at snf.stanford.edu Wed Jan 10 07:28:35 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Jan 2007 07:28:35 -0800 Subject: Problem svgcoat SNF 2007-01-09 15:55:40: boken wafer in prime module Message-ID: Hotplate has been cleaned, ok to use. From vilanova at snf.stanford.edu Wed Jan 10 07:28:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Jan 2007 07:28:45 -0800 Subject: Comment svgcoat SNF 2007-01-09 17:53:01: Message-ID: From vilanova at snf.stanford.edu Wed Jan 10 07:28:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Jan 2007 07:28:55 -0800 Subject: Comment svgcoat SNF 2007-01-09 17:54:44: Message-ID: From jparker at snf.stanford.edu Fri Jan 12 07:57:25 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 12 Jan 2007 07:57:25 -0800 Subject: Comment svgcoat SNF 2007-01-12 07:57:25: "2mm edge" is large Message-ID: "2mm edge bead removal" removes somewhat more than 2mm (4 mm perhaps). Saw this in program 8. From uyoon at snf.stanford.edu Fri Jan 12 11:43:33 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Fri, 12 Jan 2007 11:43:33 -0800 Subject: Problem svgcoat SNF 2007-01-12 11:43:32: Cesar adjusted the vacuum switch. Message-ID: taking system reticle. did the exposure test with100mJ/cm2 and 1.2 um line /spce looked okay. Do anyone want to try? From lindaw at snf.stanford.edu Sat Jan 13 13:53:39 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 13 Jan 2007 13:53:39 -0800 Subject: Problem svgcoat SNF 2007-01-13 13:53:39: track1 HMDS alarm is chirping Message-ID: From huangzb at snf.stanford.edu Sat Jan 13 17:27:07 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 13 Jan 2007 17:27:07 -0800 Subject: Problem svgcoat SNF 2007-01-13 17:27:06: intermittent HMDS alarm on Track 1 Message-ID: From huangzb at snf.stanford.edu Sat Jan 13 18:05:14 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 13 Jan 2007 18:05:14 -0800 Subject: Problem svgcoat SNF 2007-01-13 18:05:13: transfer stop frequently at auto mode Message-ID: From mahnaz at snf.stanford.edu Mon Jan 15 15:07:44 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 15 Jan 2007 15:07:44 -0800 Subject: Comment svgcoat SNF 2007-01-15 15:07:44: Low HMDS Message-ID: You can run the system in manual mode, Eric will fill up the canister as soon as he gets around it. Thanks Eric. From ericp at snf.stanford.edu Mon Jan 15 15:46:04 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 15 Jan 2007 15:46:04 -0800 Subject: Problem svgcoat SNF 2007-01-15 15:46:03: HMDS line leak Message-ID: I refilled the HMDS #1 tank, but the pressure would not come up. I disconnected the outlet fitting, and the pressure rose to normal level. There must be a leak in the line between the canister and the track. I left the canister full, so that the alarm on the track goes off, and users are able to run track #1 (absent prime). But I left the outlet fitting disconnected to stop the leak. In other words: Track #1 is ok to use, but if you try to use the prime station, your wafers will not get primed. From mahnaz at snf.stanford.edu Tue Jan 16 15:51:42 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 15:51:42 -0800 Subject: Shutdown svgcoat SNF 2007-01-16 15:51:42: rough EBR and huage EBR Message-ID: From mahnaz at snf.stanford.edu Tue Jan 16 16:40:33 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 16:40:33 -0800 Subject: Shutdown svgcoat SNF 2007-01-16 15:51:42: rough EBR and huage EBR Message-ID: adjusted the presser on canister to 5, it drifts, i need to keep an eye on it. Arm 6 and arm 7 adjusted as well. Still HMDS is not resolved use the YES oven. You are able to run it auto mode. From mahnaz at snf.stanford.edu Tue Jan 16 16:41:24 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 16:41:24 -0800 Subject: Problem svgcoat SNF 2007-01-13 18:05:13: transfer stop frequently at auto mode Message-ID: Pico track replaced a broken belt. From mahnaz at snf.stanford.edu Tue Jan 16 16:42:21 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 16:42:21 -0800 Subject: Problem svgcoat SNF 2007-01-12 11:43:32: Cesar adjusted the vacuum switch. Message-ID: wrong message for the system, meant for ultrateck. From mahnaz at snf.stanford.edu Tue Jan 16 16:43:12 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 16:43:12 -0800 Subject: Comment svgcoat SNF 2007-01-12 07:57:25: "2mm edge" is large Message-ID: adjusted all of this, read earlier email. We need to h`keep an eye on the EBR canister, very unstable. From mahnaz at snf.stanford.edu Tue Jan 16 16:44:26 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 16:44:26 -0800 Subject: Comment svgcoat SNF 2007-01-16 16:44:25: system is up and running Message-ID: Do not use the prime on the track and please report any issues, I need the information. From vilanova at snf.stanford.edu Wed Jan 17 09:21:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Jan 2007 09:21:07 -0800 Subject: Problem svgcoat SNF 2007-01-13 13:53:39: track1 HMDS alarm is chirping Message-ID: HMDS alarm was cleared by Eric P. From vilanova at snf.stanford.edu Wed Jan 17 09:21:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Jan 2007 09:21:21 -0800 Subject: Problem svgcoat SNF 2007-01-13 17:27:06: intermittent HMDS alarm on Track 1 Message-ID: Read Previous message. From gth at snf.stanford.edu Thu Jan 25 01:05:42 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 25 Jan 2007 01:05:42 -0800 Subject: Problem svgcoat SNF 2007-01-25 01:05:42: svgcoat 1 not running. Message-ID: using negative ebeam resist to coat on silicon (program 3) track simply not working, the bake program shows 0 sec. please help -gaurav From vilanova at snf.stanford.edu Mon Jan 29 07:43:56 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Jan 2007 07:43:56 -0800 Subject: Problem svgcoat SNF 2007-01-25 01:05:42: svgcoat 1 not running. Message-ID: User Doesnt know how to check the bake programs or change them , I checked everything and all the events are good and working,ok to use. From king at snf.stanford.edu Wed Jan 31 16:30:39 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 31 Jan 2007 16:30:39 -0800 Subject: Problem svgcoat SNF 2007-01-31 16:30:39: Spewing junk in the PR Message-ID: