Problem svgcoat SNF 2007-01-08 15:08:12: 7 um thickness is within spec but

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jan 9 10:41:16 PST 2007


I've adjusted the dispense rate for the thick resist program
I Cycled many wafers , Uniformity Looks great, Ok to use. 




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