Problem svgcoat SNF 2007-01-09 11:48:30: wafers sticking

dgunning at snf.stanford.edu dgunning at snf.stanford.edu
Tue Jan 9 11:48:30 PST 2007


1.1mm glass wafers were getting stuck part way into receiving cassette.  Final wafer also stuck at primer station...wouldn't move onto resist station.  Now cannot get first cassette holder to rise up fully.




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