Problem svgcoat SNF 2007-01-12 11:43:32: Cesar adjusted the vacuum switch.

uyoon at snf.stanford.edu uyoon at snf.stanford.edu
Fri Jan 12 11:43:33 PST 2007


taking system reticle.    did the exposure test with100mJ/cm2
and 1.2 um line /spce looked okay.
Do anyone want to try?




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