From okilic at snf.stanford.edu Wed Jul 4 17:43:35 2007 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Wed, 4 Jul 2007 17:43:35 -0700 Subject: Problem svgcoat SNF 2007-07-04 17:43:34: Coater 1 broke wafer Message-ID: Wafer broke during spin. Some of the pieces are still inside the resist soup. From gsosa at snf.stanford.edu Thu Jul 5 09:12:33 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Jul 2007 09:12:33 -0700 Subject: Shutdown svgcoat SNF 2007-07-05 09:12:33: replacing the catch cup Message-ID: system had broken wafer. Replacing the catch cup. From gsosa at snf.stanford.edu Thu Jul 5 10:33:39 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Jul 2007 10:33:39 -0700 Subject: Shutdown svgcoat SNF 2007-07-05 09:12:33: replacing the catch cup Message-ID: Replaced the catch cup. Tested system operation. All OK From gsosa at snf.stanford.edu Thu Jul 5 10:34:05 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Jul 2007 10:34:05 -0700 Subject: Problem svgcoat SNF 2007-07-04 17:43:34: Coater 1 broke wafer Message-ID: Replaced the catch cup. Tested system operation. From mahnaz at snf.stanford.edu Fri Jul 6 11:12:52 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Jul 2007 11:12:52 -0700 Subject: Problem svgcoat SNF 2007-07-06 11:12:51: EBR splash/extra drip Message-ID: Prog 5 I line resist for ASML has a extra drip half way dispensing and I have noticed a lot of EBR splash. From mahnaz at snf.stanford.edu Fri Jul 6 11:16:22 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Jul 2007 11:16:22 -0700 Subject: Problem svgcoat SNF 2007-07-06 11:16:22: EBR/ extra drip Message-ID: Prog 5 is the I line resist for ASML I noticed a lot of EBR splash and an extra drip half way dispensing. From erichall at snf.stanford.edu Mon Jul 9 22:35:49 2007 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Mon, 9 Jul 2007 22:35:49 -0700 Subject: Problem svgcoat SNF 2007-07-09 22:35:48: Send Indexer Jerky Message-ID: Send Indexer moves in a very jerky fashion, does not function correctly on 'auto' mode. From vilanova at snf.stanford.edu Tue Jul 10 07:40:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Jul 2007 07:40:27 -0700 Subject: Problem svgcoat SNF 2007-07-09 22:35:48: Send Indexer Jerky Message-ID: Checked and tested sender Indexer , everything Looks normal I ran 2 cycles ( 8 wafers ) twice I could not repeat the problem system ready to use. From mtang at snf.stanford.edu Tue Jul 10 09:24:39 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 Jul 2007 09:24:39 -0700 Subject: Problem svgcoat SNF 2007-07-10 09:24:39: Back EBR splash Message-ID: Observed on a 3" wafer. Jason also observed this on a 4" wafer. From vilanova at snf.stanford.edu Wed Jul 11 07:36:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Jul 2007 07:36:47 -0700 Subject: Problem svgcoat SNF 2007-07-06 11:12:51: EBR splash/extra drip Message-ID: Adjusted Suck back and dispense rate for program # 5 Also cleaned the catch cup and bottom nozzle, adjusted exhaust system, cycled wafers, NO more EBR splashes Good to use. From vilanova at snf.stanford.edu Wed Jul 11 07:39:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Jul 2007 07:39:18 -0700 Subject: Problem svgcoat SNF 2007-07-06 11:16:22: EBR/ extra drip Message-ID: Cleaned Nozzle , adjusted Suck back , cleaned catch cup, adjusted Exhaust system , Cycled wafers , they look clean no more EBR splashes! Good to use From vilanova at snf.stanford.edu Wed Jul 11 07:39:34 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Jul 2007 07:39:34 -0700 Subject: Problem svgcoat SNF 2007-07-10 09:24:39: Back EBR splash Message-ID: Cleaned Nozzle , adjusted Suck back , cleaned catch cup, adjusted Exhaust system , Cycled wafers , they look clean no more EBR splashes! Good to use From huangzb at snf.stanford.edu Thu Jul 12 11:49:31 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:49:31 -0700 Subject: Problem svgcoat SNF 2007-07-12 11:49:30: 1 wafer out of 3 come out with particles on Prog 8. rework is fine Message-ID: From vilanova at snf.stanford.edu Fri Jul 13 08:03:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 Jul 2007 08:03:01 -0700 Subject: Problem svgcoat SNF 2007-07-12 11:49:30: 1 wafer out of 3 come out with particles on Prog 8. rework is fine Message-ID: purged Line cycled 14 wafers ( dummy wafers) They all came out good without any particles, I cleaned up all the dummy wafers, system Ready to use. From kattsai at snf.stanford.edu Sun Jul 15 09:25:39 2007 From: kattsai at snf.stanford.edu (kattsai at snf.stanford.edu) Date: Sun, 15 Jul 2007 09:25:39 -0700 Subject: Comment svgcoat SNF 2007-07-15 09:25:39: track for vapor prime doesn't move Message-ID: From vilanova at snf.stanford.edu Wed Jul 18 11:31:08 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Jul 2007 11:31:08 -0700 Subject: Comment svgcoat SNF 2007-07-15 09:25:39: track for vapor prime doesn't move Message-ID: could not repeat the problem , system working fine. From mariamd at snf.stanford.edu Thu Jul 19 09:27:48 2007 From: mariamd at snf.stanford.edu (mariamd at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:27:48 -0700 Subject: Problem svgcoat SNF 2007-07-19 09:27:48: HDMS Prime Message-ID: HDMS Prime isn't working From gsosa at snf.stanford.edu Thu Jul 19 11:14:26 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Jul 2007 11:14:26 -0700 Subject: Problem svgcoat SNF 2007-07-19 09:27:48: HDMS Prime Message-ID: Replaced fuse on HMDS carriage assembly. Tested wafer transfer. All OK. From gsosa at snf.stanford.edu Thu Jul 19 15:19:08 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Jul 2007 15:19:08 -0700 Subject: Comment svgcoat SNF 2007-07-19 15:19:01: Belt motor on prime module Message-ID: The belt motor on the prime station was squeaking and belts moving slowly. Replaced the belt motor with a now motor.Adjusted belt speed for centering on hotplate. Tested transfer. All looks good. GS/MV From jimkruger at snf.stanford.edu Mon Jul 23 10:30:45 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 23 Jul 2007 10:30:45 -0700 Subject: Problem svgcoat SNF 2007-07-23 10:30:45: Vapor Prime station, Track1 dirty Message-ID: Vapor prime hot plate could stand (Acetone?) cleaning. Looks like someone tried a wafer resist side down. From vilanova at snf.stanford.edu Mon Jul 23 11:07:33 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Jul 2007 11:07:33 -0700 Subject: Problem svgcoat SNF 2007-07-23 10:30:45: Vapor Prime station, Track1 dirty Message-ID: Cleaned hotplate , cycled wafers , ok to use, I also replaced a broken lamp on the microscope Right Next to the Nanospec ( the one outside the yellow light room ) From king at snf.stanford.edu Thu Jul 26 17:11:28 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 26 Jul 2007 17:11:28 -0700 Subject: Problem svgcoat SNF 2007-07-26 17:11:27: PR dispense is marginal Message-ID: It often leaves thin areas; a long term kind of random problem. Maybe it needs more resist?? From vilanova at snf.stanford.edu Fri Jul 27 07:18:44 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 Jul 2007 07:18:44 -0700 Subject: Problem svgcoat SNF 2007-07-26 17:11:27: PR dispense is marginal Message-ID: I found a lot of bubbles in the line, Purged line, Adjusted dispense hose, cycled wafers, ok to use. From rmelamud at snf.stanford.edu Tue Jul 31 13:00:37 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Tue, 31 Jul 2007 13:00:37 -0700 Subject: Problem svgcoat SNF 2007-07-31 13:00:36: uneven coating Message-ID: Prog #2 with 1um PR is giving non-uniform coating with streaks From vilanova at snf.stanford.edu Tue Jul 31 14:03:58 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Jul 2007 14:03:58 -0700 Subject: Problem svgcoat SNF 2007-07-31 13:00:36: uneven coating Message-ID: Adjusted dispense rate, cycled wafers, good to use.