Problem svgcoat SNF 2007-07-06 11:16:22: EBR/ extra drip

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Jul 6 11:16:22 PDT 2007


Prog 5 is the I line resist for ASML
I noticed a lot of EBR splash and an extra drip half way 
dispensing.




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