Problem svgcoat SNF 2007-07-06 11:12:51: EBR splash/extra drip

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jul 11 07:36:47 PDT 2007


Adjusted Suck back and dispense rate for program # 5
Also cleaned the catch cup and bottom nozzle, adjusted
exhaust system, cycled wafers, NO more EBR splashes
Good to use. 




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