Problem svgcoat SNF 2007-07-12 11:49:30: 1 wafer out of 3 come out with particles on Prog 8. rework is fine

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jul 13 08:03:01 PDT 2007


purged Line cycled 14 wafers ( dummy wafers) They all came 
out good without any particles, I cleaned up all the dummy
wafers, system Ready  to use. 




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