From uyoon at snf.stanford.edu Wed Jun 6 10:02:34 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 6 Jun 2007 10:02:34 -0700 Subject: Comment svgcoat SNF 2007-06-06 10:02:33: Message-ID: spr220-7 resist dispense stream is not straight down. GARY WILL ADJUST THE DISPENSE TIP. From vilanova at snf.stanford.edu Wed Jun 6 11:15:09 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Jun 2007 11:15:09 -0700 Subject: Comment svgcoat SNF 2007-06-06 10:02:33: Message-ID: From gsosa at snf.stanford.edu Tue Jun 12 14:09:28 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 Jun 2007 14:09:28 -0700 Subject: Problem svgcoat SNF 2007-01-15 15:46:03: HMDS line leak Message-ID: HMDS Module has been repaired by maintenance and tested by process engineering. The following work has been done. 1. Replaced the vapor prime Nupro Valve 2. Replaced the CPU board and reprogrammed 3. Adjusted belt speed and rail sensor for wafer centering 4. Adjusted bake cap for vacuum chamber sealing. 5. Measured conact angle on program #1 : ~32 degrees 6. Created program #7( 50 second prime) 7. Measured contact angle on program #7: ~ 48 - 53 Deg. 8. Monitored canister for a week. no sign of leaks or fumes Turned system over to engineering for testing. Please see Email from Mahnaz for details. Vapor prime OK to use. From gsosa at snf.stanford.edu Tue Jun 12 14:10:27 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 Jun 2007 14:10:27 -0700 Subject: Comment svgcoat SNF 2007-01-16 16:44:25: system is up and running Message-ID: Vapor prime repaired and ready for use. Please see prior entry for details. From gsosa at snf.stanford.edu Tue Jun 12 14:11:26 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 Jun 2007 14:11:26 -0700 Subject: Comment svgcoat SNF 2007-01-15 15:07:44: Low HMDS Message-ID: Vapor prime module repaired and ready for use. Please see the next entry for details. From ytcheng at snf.stanford.edu Wed Jun 27 14:49:47 2007 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Wed, 27 Jun 2007 14:49:47 -0700 Subject: Problem svgcoat SNF 2007-06-27 14:49:47: Sometimes photoresist doesn't dispense Message-ID: Sometimes, the photoresist doesn't dispense. From vilanova at snf.stanford.edu Wed Jun 27 14:53:23 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Jun 2007 14:53:23 -0700 Subject: Problem svgcoat SNF 2007-06-27 14:49:47: Sometimes photoresist doesn't dispense Message-ID: Purged line & checked programs, adjusted dispense program ( someone changed it, tested , ok to use. From sanjah at snf.stanford.edu Fri Jun 29 11:43:00 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Fri, 29 Jun 2007 11:43:00 -0700 Subject: Problem svgcoat SNF 2007-06-29 11:42:59: program # 7 doesn't do EBR (5 mm) Message-ID: From vilanova at snf.stanford.edu Fri Jun 29 13:26:00 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 29 Jun 2007 13:26:00 -0700 Subject: Problem svgcoat SNF 2007-06-29 11:42:59: program # 7 doesn't do EBR (5 mm) Message-ID: someone changed the program Step from wash to rinse, make sure you always check your events before you use the system Cycled 14 wafers EBR working Fine, Ok to use.-