From vilanova at snf.stanford.edu Thu Mar 1 11:26:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Mar 2007 11:26:45 -0800 Subject: Shutdown svgcoat SNF 2007-03-01 11:26:44: Transfer Belts MOtor Broken........ Message-ID: From vilanova at snf.stanford.edu Thu Mar 1 13:46:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Mar 2007 13:46:25 -0800 Subject: Shutdown svgcoat SNF 2007-03-01 11:26:44: Transfer Belts MOtor Broken........ Message-ID: Checked transfer belts motor ok, Found a wirw disconnected to that motor , repaired broken wire, tested and cycled system .,ok to use. From king at snf.stanford.edu Fri Mar 2 22:09:23 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 2 Mar 2007 22:09:23 -0800 Subject: Problem svgcoat SNF 2007-03-02 22:09:23: EBR stream misses the wafer Message-ID: From vilanova at snf.stanford.edu Mon Mar 5 07:20:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Mar 2007 07:20:10 -0800 Subject: Problem svgcoat SNF 2007-03-02 22:09:23: EBR stream misses the wafer Message-ID: Adjusted EBR Arm Position , cycled wafers ( programs 7 and 8) EBR Looks Good, good to use. From uli at snf.stanford.edu Tue Mar 6 11:28:28 2007 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 6 Mar 2007 11:28:28 -0800 Subject: Problem svgcoat SNF 2007-03-06 11:28:28: prog 7 1um resist not dispensing Message-ID: From vilanova at snf.stanford.edu Tue Mar 6 13:37:29 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Mar 2007 13:37:29 -0800 Subject: Problem svgcoat SNF 2007-03-06 11:28:28: prog 7 1um resist not dispensing Message-ID: Adjusted Air pressure , purged line and cycled wafer, Good to use. From sanjah at snf.stanford.edu Sat Mar 10 13:09:36 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Sat, 10 Mar 2007 13:09:36 -0800 Subject: Problem svgcoat SNF 2007-03-10 13:09:35: unevern eb removal Message-ID: 2mm EB removal, prog #7 From vilanova at snf.stanford.edu Mon Mar 12 07:34:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Mar 2007 07:34:53 -0700 Subject: Problem svgcoat SNF 2007-03-10 13:09:35: unevern eb removal Message-ID: I just Cycled many wafers and I could not repeat the EBR Problem , EBR Looks FIne , Operator error, Ok to use. From jparker at snf.stanford.edu Mon Mar 12 10:32:41 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Mon, 12 Mar 2007 10:32:41 -0700 Subject: Problem svgcoat SNF 2007-03-12 10:32:40: Jagged edge bead removal Message-ID: Observe a sawtooth-like edge bead. Sawteeth can be at intervals as far as 1/3rd around wafer or as close as 1.5 cm from each other. (Depends on wafer.) *Conditions: -2mm and 5 mm both see problem (can be more obvious with 5 mm edge bead removal) -Can see problem in both programs 7 and 8 *Additional info: -Problem not obvious while wafer is spinning (some resist gets removed, so spinning makes EB look clear all the way around). -Liquid stream looks continuous. -Wafer seems centered (no blur at edges). -In light of last two facts, guess is some periodic wafer wobble causes problem. From vilanova at snf.stanford.edu Mon Mar 12 10:57:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Mar 2007 10:57:57 -0700 Subject: Problem svgcoat SNF 2007-03-12 10:32:40: Jagged edge bead removal Message-ID: EBR Valve iar was too Low I incresed the Air flow to it I cycled wafers , EBR dispense Ok for both programs # 7, 8. From king at snf.stanford.edu Tue Mar 13 17:09:19 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 13 Mar 2007 17:09:19 -0700 Subject: Problem svgcoat SNF 2007-03-13 17:09:18: uneven PR Message-ID: Track 1 has been leaving a big nonuniform area in the center of the wafers (using bare test wafers.) From sjo at snf.stanford.edu Tue Mar 13 22:06:32 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Tue, 13 Mar 2007 22:06:32 -0700 Subject: Problem svgcoat SNF 2007-03-13 22:06:31: EBR misadjusted Message-ID: 2mm EBR end up being 0mm EBR. 5mm EBR ends up being 2mm EBR. From vilanova at snf.stanford.edu Wed Mar 14 14:40:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2007 14:40:01 -0700 Subject: Problem svgcoat SNF 2007-03-13 17:09:18: uneven PR Message-ID: adjusted EBR Valve pressure, Cycled wafers , Good to use. From vilanova at snf.stanford.edu Wed Mar 14 14:40:29 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2007 14:40:29 -0700 Subject: Problem svgcoat SNF 2007-03-13 22:06:31: EBR misadjusted Message-ID: Please read previous message. From crichter at snf.stanford.edu Fri Mar 16 15:02:41 2007 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 16 Mar 2007 15:02:41 -0700 Subject: Problem svgcoat SNF 2007-03-16 15:02:40: SVGCoat #1: 2mm EBR looks like 3mm EBR Message-ID: From mahnaz at snf.stanford.edu Wed Mar 21 11:57:56 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 21 Mar 2007 11:57:56 -0700 Subject: Shutdown svgcoat SNF 2007-03-21 11:57:56: changing the EBR nozzel Message-ID: Gary is replacing it. From mahnaz at snf.stanford.edu Wed Mar 21 12:57:59 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 21 Mar 2007 12:57:59 -0700 Subject: Shutdown svgcoat SNF 2007-03-21 11:57:56: changing the EBR nozzel Message-ID: the nozzel has been replaced, I think garry told me all done. Please test for good EBR if not I will test later. mahnaz From uyoon at snf.stanford.edu Wed Mar 21 14:10:24 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 21 Mar 2007 14:10:24 -0700 Subject: Comment svgcoat SNF 2007-03-21 14:10:24: Message-ID: Both EBR nozzle have been changed. EBR looked fine on both 2mm and 5 mm. on prog#7, 8, and 4. From sjo at snf.stanford.edu Thu Mar 22 01:55:55 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Thu, 22 Mar 2007 01:55:55 -0700 Subject: Comment svgcoat SNF 2007-03-22 01:55:55: EBR 5mm works, 2mm does not Message-ID: I just wanted to add a comment - the EBR problems occur onlu at the 2mm EBR setting, because the EBR stream hits the wafer edge and breaks up into a spray. If it was a little further in, it would be o.k. That is also the reason why the 5mm EBR works fine. To get good 2mm EBR, I would position the arm a little further inwards, and increase the EBR spin speed until the EBR ring matches the spec. From mahnaz at snf.stanford.edu Thu Mar 22 09:31:59 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 22 Mar 2007 09:31:59 -0700 Subject: Shutdown svgcoat SNF 2007-03-22 09:31:59: EBR nozzel needs adjustment Message-ID: lots of EBR back splash. From uli at snf.stanford.edu Thu Mar 22 11:34:45 2007 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 22 Mar 2007 11:34:45 -0700 Subject: Shutdown svgcoat SNF 2007-03-22 09:31:59: EBR nozzel needs adjustment Message-ID: Don't use the EBR! We are still working on it! From uli at snf.stanford.edu Thu Mar 22 11:35:04 2007 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 22 Mar 2007 11:35:04 -0700 Subject: Problem svgcoat SNF 2007-03-22 11:35:03: Don't use the EBR! We are still working on it! Message-ID: From mahnaz at snf.stanford.edu Fri Mar 23 11:25:22 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 23 Mar 2007 11:25:22 -0700 Subject: Comment svgcoat SNF 2007-03-22 01:55:55: EBR 5mm works, 2mm does not Message-ID: nozzel has been replaced and adjusted. From mahnaz at snf.stanford.edu Fri Mar 23 11:25:56 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 23 Mar 2007 11:25:56 -0700 Subject: Problem svgcoat SNF 2007-03-22 11:35:03: Don't use the EBR! We are still working on it! Message-ID: gary has done more adjustment this morning, tested looks good. From mahnaz at snf.stanford.edu Fri Mar 23 11:26:21 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 23 Mar 2007 11:26:21 -0700 Subject: Problem svgcoat SNF 2007-03-16 15:02:40: SVGCoat #1: 2mm EBR looks like 3mm EBR Message-ID: noted From barlian at snf.stanford.edu Sun Mar 25 19:55:46 2007 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sun, 25 Mar 2007 19:55:46 -0700 Subject: Problem svgcoat SNF 2007-03-25 19:55:45: transfer problem Message-ID: From vilanova at snf.stanford.edu Mon Mar 26 13:44:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 13:44:24 -0700 Subject: Problem svgcoat SNF 2007-03-25 19:55:45: transfer problem Message-ID: Checked transfer , Cycled wafers , Ok to use. I could not duplicate the user problem. From uyoon at snf.stanford.edu Wed Mar 28 15:49:48 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Wed, 28 Mar 2007 15:49:48 -0700 Subject: Comment svgcoat SNF 2007-03-28 15:49:47: Message-ID: EBR looks more like 4mm, instead of 2mm, but looks nice From vilanova at snf.stanford.edu Fri Mar 30 07:38:15 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 30 Mar 2007 07:38:15 -0700 Subject: Comment svgcoat SNF 2007-03-21 14:10:24: Message-ID: From vilanova at snf.stanford.edu Fri Mar 30 07:39:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 30 Mar 2007 07:39:43 -0700 Subject: Comment svgcoat SNF 2007-03-28 15:49:47: Message-ID: Adjusted back to 2MM it was actually at 3mm before ( I Measure it before adjustment) ok to use. From tkodama at snf.stanford.edu Sat Mar 31 13:46:57 2007 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Sat, 31 Mar 2007 13:46:57 -0700 Subject: Comment svgcoat SNF 2007-03-31 13:46:56: Program Message-ID: Program had been clear when I attempted to use.