Problem svgcoat SNF 2007-03-12 10:32:40: Jagged edge bead removal

jparker at snf.stanford.edu jparker at snf.stanford.edu
Mon Mar 12 10:32:41 PDT 2007


Observe a sawtooth-like edge bead. Sawteeth can be at intervals as far as 1/3rd around wafer or as close as 1.5 cm from each other. (Depends on wafer.)
*Conditions:
-2mm and 5 mm both see problem (can be more obvious with 5 mm edge bead removal)
-Can see problem in both programs 7 and 8
*Additional info:
-Problem not obvious while wafer is spinning (some resist gets removed, so spinning makes EB look clear all the way around).
-Liquid stream looks continuous.
-Wafer seems centered (no blur at edges).
-In light of last two facts, guess is some periodic wafer wobble causes problem.




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