Problem svgcoat SNF 2007-03-12 10:32:40: Jagged edge bead removal

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 12 10:57:57 PDT 2007

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EBR Valve iar was too Low I incresed the Air flow to it
I cycled wafers , EBR dispense Ok for both programs # 7, 8.

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