Comment svgcoat SNF 2007-03-22 01:55:55: EBR 5mm works, 2mm does not

sjo at snf.stanford.edu sjo at snf.stanford.edu
Thu Mar 22 01:55:55 PDT 2007


I just wanted to add a comment - the EBR problems occur onlu at the 2mm EBR setting, because the EBR stream hits the wafer edge and breaks up into a spray. If it was a little further in, it would be o.k. That is also the reason why the 5mm EBR works fine. To get good 2mm EBR, I would position the arm a little further inwards, and increase the EBR spin speed until the EBR ring matches the spec.




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