Problem svgcoat SNF 2007-05-04 05:11:30: baking chuck very dirty with PR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri May 4 07:06:53 PDT 2007


Cleaned Resist from chuck , hotplate chill plate 1 and # 2
Cleaned hotplate and chuck from coater # 2 as well , Also I 
Found the developer track Almost under the same condition.
Ok to use. 




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