Shutdown svgcoat SNF 2007-05-04 08:45:24: Spindle Problem
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri May 4 08:45:25 PDT 2007
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Shutdown svgcoat SNF 2007-05-04 08:45:24: Spindle Problem
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Wafers not spinning. Still troubleshooting
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Problem svgcoat SNF 2007-05-04 05:11:30: baking chuck very dirty with PR
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Shutdown svgcoat SNF 2007-05-04 08:45:24: Spindle Problem
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