From jparker at snf.stanford.edu Fri Nov 2 11:19:07 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 2 Nov 2007 11:19:07 -0700 Subject: Problem svgcoat SNF 2007-11-02 11:19:06: i-line resist issues Message-ID: Edges of wafer do not get coverage for thick i-line resist (disp3, 1 um tests) when HMDS is used. Specifics: 2-5 ~.5 cm^2 areas without resist at edges. Do not see this for 0.7 um thick resist. Light comet 2/3rds towards edge in all cases. From gsosa at snf.stanford.edu Mon Nov 5 08:38:54 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Nov 2007 08:38:54 -0800 Subject: Shutdown svgcoat SNF 2007-11-05 08:38:53: Chuck not coming up Message-ID: Chuck does not raise to top position after processing is complete. GS From gsosa at snf.stanford.edu Mon Nov 5 09:12:33 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Nov 2007 09:12:33 -0800 Subject: Shutdown svgcoat SNF 2007-11-05 08:38:53: Chuck not coming up Message-ID: Checked and adjusted chuck up speed. checked all hoses for leaks. From mahnaz at snf.stanford.edu Tue Nov 6 13:24:02 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 6 Nov 2007 13:24:02 -0800 Subject: Problem svgcoat SNF 2007-11-06 13:24:01: I line resist looks BAD Message-ID: Jason been trying for at least 2 hours, result very bad. purged the line, cleaned nozzel EBR splash, too much dispense, bad uniformity waste of time and resist. From gsosa at snf.stanford.edu Tue Nov 6 17:16:03 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 6 Nov 2007 17:16:03 -0800 Subject: Problem svgcoat SNF 2007-11-06 13:24:01: I line resist looks BAD Message-ID: Reduced the resist volume and adjusted suckback. Created anew arm program(arm 1) which dispenses/sweeps the same as arm program #9 but allows for more accurate nozzle positioning specific to resist nozzle 3. Gave Mahzaz program informatio and thickness measurements. From gsosa at snf.stanford.edu Wed Nov 7 15:05:44 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Nov 2007 15:05:44 -0800 Subject: Comment svgcoat SNF 2007-11-07 15:05:44: Scheduled downtime 11/8/2007 Message-ID: This coater will be unavailable on Thursday 11/8 from 10:00AM to 2:00 PM. We will be installing a new resist pump for the SPR 955 0.7 resist. Please check coral for updates as we may finish the work sooner. From gsosa at snf.stanford.edu Thu Nov 8 09:07:54 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Nov 2007 09:07:54 -0800 Subject: Comment svgcoat SNF 2007-11-08 09:07:54: 955 0.7 process not available Message-ID: The I-line resist (955 0.7) is not available. Dispense line has been flushed with solvent to prepare for new pump install. GS From vilanova at snf.stanford.edu Thu Nov 8 10:26:03 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Nov 2007 10:26:03 -0800 Subject: Shutdown svgcoat SNF 2007-11-08 10:26:02: system under maintenance..... Message-ID: From vilanova at snf.stanford.edu Thu Nov 8 13:32:02 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Nov 2007 13:32:02 -0800 Subject: Shutdown svgcoat SNF 2007-11-08 10:26:02: system under maintenance..... Message-ID: Maintenance completed, Except for program 5 we are still tesdting it. .stay tuned. ............................... :-) From gsosa at snf.stanford.edu Thu Nov 8 15:46:17 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Nov 2007 15:46:17 -0800 Subject: Comment svgcoat SNF 2007-11-08 15:46:16: 955 0.7 resist update Message-ID: New pump for I-line resist installed and set up. 955 0.7 programs are ready to use. Please use arm program #1 instead of arm program #8 during resist dispense. Thickness tests- 1.0 Micron Ave: 9811 std dev: 9.26, 0.9 Micron- Ave: 8819 std dev: 16.85, 0.7 Micron- Ave: 6822 std dev: 9.48. From vilanova at snf.stanford.edu Fri Nov 9 10:19:39 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:19:39 -0800 Subject: Problem svgcoat SNF 2007-09-20 14:29:01: Tried coating 3 wafers with 955 Message-ID: 955 new pump installed. From vilanova at snf.stanford.edu Fri Nov 9 10:20:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:20:53 -0800 Subject: Problem svgcoat SNF 2007-09-07 15:37:08: Uniformity problem and alignment Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:21:03 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:21:03 -0800 Subject: Problem svgcoat SNF 2007-08-28 15:42:42: nonuniform resist Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:21:16 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:21:16 -0800 Subject: Comment svgcoat SNF 2007-09-18 16:13:57: 955 Streaking Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:21:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:21:25 -0800 Subject: Comment svgcoat SNF 2007-09-19 09:22:17: spr 955 coating issue Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:21:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:21:47 -0800 Subject: Problem svgcoat SNF 2007-09-18 11:59:47: Mike ran 6 wfs and all of them Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:21:56 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:21:56 -0800 Subject: Problem svgcoat SNF 2007-11-02 11:19:06: i-line resist issues Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:22:05 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:22:05 -0800 Subject: Comment svgcoat SNF 2007-09-20 17:04:00: 955 Resist coat looks great Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:22:14 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:22:14 -0800 Subject: Comment svgcoat SNF 2007-10-18 12:39:55: i line resist thickness Message-ID: New Pump Installed and tested , cyled wafers, ok to use From vilanova at snf.stanford.edu Fri Nov 9 10:22:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:22:25 -0800 Subject: Comment svgcoat SNF 2007-10-24 09:23:15: I-line info Message-ID: cleared. From vilanova at snf.stanford.edu Fri Nov 9 10:22:36 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:22:36 -0800 Subject: Comment svgcoat SNF 2007-10-24 09:29:17: I-line info (addendum) Message-ID: Cleared. From vilanova at snf.stanford.edu Fri Nov 9 10:22:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:22:53 -0800 Subject: Comment svgcoat SNF 2007-10-24 16:15:09: 3612 Message-ID: adjusted & tested , good to use. From linyoucao at snf.stanford.edu Thu Nov 15 18:26:05 2007 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Thu, 15 Nov 2007 18:26:05 -0800 Subject: Comment svgcoat SNF 2007-11-15 18:26:04: resist contamination Message-ID: hot plate and vaccum chuck are contaminated by photoresist. From linyoucao at snf.stanford.edu Thu Nov 15 18:26:56 2007 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Thu, 15 Nov 2007 18:26:56 -0800 Subject: Problem svgcoat SNF 2007-11-15 18:26:56: photoresist contamination Message-ID: hotplate and c\vaccum chuck are contaminated with photoresist. From gsosa at snf.stanford.edu Fri Nov 16 07:29:22 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 07:29:22 -0800 Subject: Shutdown svgcoat SNF 2007-11-16 07:29:21: Photoresist on chuck and hotplates Message-ID: Photoresist is all over spin chuck and hotplate. From gsosa at snf.stanford.edu Fri Nov 16 08:45:17 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 08:45:17 -0800 Subject: Shutdown svgcoat SNF 2007-11-16 07:29:21: Photoresist on chuck and hotplates Message-ID: Cleaned the photoresist off of the spin chuck and hotplate. From gsosa at snf.stanford.edu Fri Nov 16 08:46:22 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 08:46:22 -0800 Subject: Problem svgcoat SNF 2007-11-15 18:26:56: photoresist contamination Message-ID: Cleaned the photoresist off of the spin chuck and hotplate. From gsosa at snf.stanford.edu Fri Nov 16 08:46:53 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 08:46:53 -0800 Subject: Comment svgcoat SNF 2007-11-15 18:26:04: resist contamination Message-ID: Cleaned the photoresist off of the spin chuck and hotplate. From kimsora at snf.stanford.edu Mon Nov 19 19:28:26 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Mon, 19 Nov 2007 19:28:26 -0800 Subject: Problem svgcoat SNF 2007-11-19 19:28:25: The resist spinner does not work. Message-ID: From vilanova at snf.stanford.edu Tue Nov 20 07:31:39 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 Nov 2007 07:31:39 -0800 Subject: Problem svgcoat SNF 2007-11-19 19:28:25: The resist spinner does not work. Message-ID: Ran All programs 2, 4, 6, 7, 8, , Spinner working Fine I could not repeat the user problem , ready to use. From jparker at snf.stanford.edu Tue Nov 20 16:06:54 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 20 Nov 2007 16:06:54 -0800 Subject: Comment svgcoat SNF 2007-11-20 16:06:54: Resist on backside edges Message-ID: Very fine bits of resist (<1mm) all around backside edges of wafers. Processed 11/15/07 and noticed 11/20/07, so may be fixed now (ie. if it was a dirty hotplate issue). Saw this over a whole cassette of wafers, running coat program 7. From vilanova at snf.stanford.edu Wed Nov 28 11:07:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Nov 2007 11:07:27 -0800 Subject: Comment svgcoat SNF 2007-11-28 11:07:25: Someone ran a wafer upside down again??? Message-ID: I just finished cleaning the hotplate , please do not run wafers upside down. From vilanova at snf.stanford.edu Wed Nov 28 14:38:08 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Nov 2007 14:38:08 -0800 Subject: Comment svgcoat SNF 2007-11-28 14:38:08: replaced empty bottle resist, 220-7 Message-ID: