Problem svgcoat SNF 2007-11-02 11:19:06: i-line resist issues

jparker at snf.stanford.edu jparker at snf.stanford.edu
Fri Nov 2 11:19:07 PDT 2007


Edges of wafer do not get coverage for thick i-line resist (disp3, 1 um tests) when HMDS is used. Specifics: 2-5  ~.5 cm^2 areas without resist at edges. Do not see this for 0.7 um thick resist.
Light comet 2/3rds towards edge in all cases.




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