Comment svgcoat SNF 2007-11-08 15:46:16: 955 0.7 resist update

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Nov 8 15:46:17 PST 2007


New pump for I-line resist installed and set up. 955 0.7 programs are ready to use. Please use arm program #1 instead of arm program #8 during resist dispense. Thickness tests- 1.0 Micron Ave: 9811 std dev: 9.26, 0.9 Micron- Ave: 8819 std dev: 16.85, 0.7 Micron- Ave: 6822 std dev: 9.48.




More information about the svgcoat-pcs mailing list